Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 0

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 1

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 2

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 3

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 4

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 5

Computer and Software Retrofit for PlasmaQuest RIE System Astex MKS, US $24,750.00 – Picture 6

Computer And Software Retrofit For Plasmaquest Rie System Astex Mks

US $24,750.00

Prosper, Texas, United States
Jan 30th

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Company Background Qualtx Technology, Inc has been in business since 1997 providing turn-key control system retrofit solutions for PlasmaTherm, PlasmaQuest, and Veeco process tools. Qualtx provides a complete replacement of all IO and signal wiring - none of the original IO system is used. The system is literally gutted and rewired in the field. Qualtx lists Raytheon, TI, AMD, NASA JPL, MIT, University of Wisconsin, Cornell University as some of its customers. PlasmaQuest Software and IO Hardware Retrofit 1 Purpose Once the proprietary sequencer and IO system begin to fail there is little that can be done with the process tool. Qualtx Technology believes that an affordable retrofit prevents an expensive replacement of the tool and so provides a complete replacement of all IO, signal wiring, and software. The purpose of this document is to specify the functionality and external interfaces of the Qualtx Technology, Inc. PQView System Software for use on the PlasmaQuest Series II RIE System. The information detailed below identifies the functionality required and does not specify how that functionality will be built. 2 Project Specification The Qualtx Technology PQView System Software will preserve the functionality of the existing software but will use multitasking methods to improve upon the existing functionality. The software will add multiple enhancements as defined below so that the process tool will have expanded usability to further the life of the tool. 3 Functional Requirements The paragraphs below describe the functionality to be incorporated in the project. 3.1 Controller Operating System The operating system is Microsoft Windows 8 Professional Edition 3.2 System Hardware Qualtx Technology, Inc. will provide the following hardware as part of the system upgrade: Note: This is a control system retrofit – this includes the operator interface and controller. When completed all of the system IO electronics and most of the wiring will have been replaced with new non-proprietary equipment. The individual breakdown for the following items is listed in section 5 below. 1) Standard Desktop Tower Computer 2) Hard disk drive 3) Windows 8.1 Operating System 4) VGA Video 5) 15” LCD Flat Panel Monitor (1440 x 900 or better resolution) 6) Keyboard and mouse interface 7) IO Hardware with (AO, AI, DI, and DO channels to interface to machine components) 8) +/- 15 VDC Power Supplies 9) +24 VDC Power Supply 10) Ethernet Interface to IO Hardware 11) Cables and wiring for full control system retrofit 12) NEMA Wall-Mount Enclosure Qualtx Technology provides non-proprietary system IO in a NEMA enclosure to be mounted behind or next to the process tool. (see pictures) Documentation: Wiring diagrams for all electrical connections and the IO panel are included as part of the retrofit. All retrofits using a NEMA enclosure include new +/-15 and 24 volt DC power supplies for control voltage. This product includes the NEMA wall-mount enclosure. 3.3 Software User Interface (see pictures) The user interface includes a configuration editor, a recipe editor, and a system control GUI. (Graphical User Interface) and will automate the use of the process tool through a Manual (Service Mode) and Automatic (Run Mode) configuration. The system software license is to run on one (1) control system provided by Qualtx Technology, Inc. The end-user does not have a license to use the software on any control system that has not been provided by Qualtx Technology, Inc. Project Specification 3.3.1 Configuration Manager The Configuration Manager is a parameters editor that allows the user to set configuration parameters that are global for all system processing. Parameters include component sizes (MFC, RF Generator, Baratron, etc) allowing the end user to swap out components and change the parameters. 3.3.2 Edit Mode Edit Mode allows the user to create an unlimited number of recipes to be run on the process tool. A recipe is then used in automatic run mode to allow the system controller to process the sample automatically. The software allows an unlimited number of recipes to be created. Recipes are stored on the hard disk drive in a file. 3.3.3 System User Interface The user interface allows users to see the status of the entire system. The software shows a schematic layout of the vacuum and gas delivery systems. In service mode the user can select a valve, flow controller, or pressure reading on the screen and the corresponding function will be executed on the process tool. The message line at the bottom of the screen tells the operator exactly what system is doing at each moment. (The screen in the pictures is for a single chamber RIE System) 3.3.4 Software Additions and Enhancements The software included as part of this retrofit specification and provided as part of the system upgrade is fully functional and in use on several system retrofits in its current state. It is not an alpha or beta version of the software. Software bug fixes are provided free of charge for one year of the initial installation date. 4 Statement of Work 4.1 Qualtx Technology Qualtx shall supply the onsite labor to install the hardware that is defined in section 3.2 of this document in the system. Qualtx shall supply the onsite labor to upgrade the PlasmaQuest system software and IO System as a full retrofit replacing the current controller and IO panel with a NEMA panel mounted to the wall behind the process tool. Qualtx shall develop, deliver and train the customer in the use of the new control system software. Qualtx shall deliver wiring diagrams, IO lists, and OEM documentation for IO modules used with system. Qualtx Technology, Inc. will not provide any hardware that is not specifically listed in section 3.2 above. The customer is responsible for providing mounting hardware or a table near the tool to house the desktop PC and LCD monitor. If the customer prefers to mount the monitor/keyboard on a swing arm from the wall or from the tool – the mounting hardware and labor to mount such hardware are the responsibility of the customer. (Qualtx Technology, Inc. will provide the desktop PC, desktop LCD Monitor, keyboard and mouse) Sometimes with older systems the gauges may not be compatible with a new control IO system. If this is the case, it is the customer’s responsibility to purchase gauges that are compatible with the new control system. If any gauge is incompatible, it will be pointed out when onsite for the initial visit. 5 Cost 5.1 Cost Breakdown The cost to provide the PlasmaQuest Series II RIE System control software for a single chamber system with load arm, 4 MFC channels with on-site installation (in the United States) of control the system hardware provided by Qualtx Technology, Inc. is $24,750 USD. This is a fixed cost that includes all expenses and travel. There will be no cost overruns. Hardware Breakdown QTY Part Number Description Cost Extended 1 PC Desktop PC with Windows 8 Professional Included 1 Monitor 1440 x 900 resolution LCD Monitor Included 1 MISC Cables, Connectors, Wires Included 2 T1K-01AC AC Power Supply Included 1 T1H-EBC100 Ethernet Base Controller Included 1 T1K-16ND3 Digital Input Module, 16 Channels Included 1 T1K-08ND3 Digital Input Module, 8 Channels Included 4 T1K-16TR Digital Output Module, 64 Channels Included 1 T1F-16AD-2 Analog Input Module, 16 Channels Included 1 T1F-16DA-2 Analog Output Module, 16 Channels Included 1 N1C243008LP NEMA Enclosure for Electronics Included 1 N1P2430 Sub-Panel Included 1 PSP24-120S DC Power Supply, 24 Volt Included 2 PSP24-120S DC Power Supply, 15 Volt Included Total Project Cost Breakdown Description Rate Cost Labor, Software Engineering, Configuration of Control System for PlasmaQuest RIE system Labor-offsite Included Onsite labor to install, customize, and debug the software for operation of the PlasmaQuest RIE system Labor-onsite in customer facility Included Labor to install hardware defined above Labor-onsite in customer facility Included Other project costs (all expenses included in project) Hotel 7 days Car rental 7 days Meals on site Airport parking Shipping Etc. Expenses are included in total project cost, they will not be billed at a later date. This is a fixed-cost project. Included Total (Fixed Price) $24,750.00 6 Terms and Conditions Payment Terms: NET 30 days from date of invoice except first invoice for 50% which is due with placement of the order. Invoices will be sent via UPS with tracking information to the accounts payable department. Software Expiration – Software has a built-in timeout and will expire for non-payment of invoices within NET 30 day terms. At this point the process tool becomes unusable until invoices are paid. DELIVERY: See Estimated Milestone Dates (An actual schedule will be provided upon payment of 50%) INSTALLATION: See Estimated Milestone Dates The process tool will be down for one week while engineering retrofit is in progress. Be sure to schedule production appropriately. Qualtx Technology, Inc. provides no process guarantees. Due to new control system hardware the process may have to be tweaked before attaining the same results received before the retrofit. PROCESS TOOL: This quote includes work to be done on a process tool in 100% working order including gas to MFCs (can be N2) and all backing pumps (roughing, and blower) and facilities infrastructure so that the software. Qualtx does not provide any repair services for hardware on the process tool, if a component is not operating at time of installation, the signal cable will be tested and it is the responsibility of the customer to have the component repaired and connected to the signal cable. Payment Description Amount (USD) Estimated Milestone Dates* 50% with placement of order $12,375.00 with order Milestone 1 – (25%) delivery of hardware to customer $6,178.50 4-8 weeks ARO Milestone 2 – (25%) upon completion of installation $6,178.50 8-12 weeks ARO Total (Fixed Price) $24,750.00 NOTE: Price for customer in Dallas, Texas will be significantly reduced as there will be no travel expenses. (contact Qualtx for Dallas, Texas area pricing.) This sale includes only one trip for installation. If the process tool is not in working order with process gasses and vacuum, the installation can continue, but this sale does not cover the cost of a future return trip to debug and test the system when the facilities are operating properly. A return trip would be at an additional cost to the customer. Average cost is $2,500 USD per day plus all expenses. No other vendors shall be working on the process tool or facilities to the tool the week of installation. Qualtx Technology, Inc. needs full access to the system. The system should be in full running condition. In other words, the week of the retrofit is not when the mechanical pumps should be sent out for cleaning or repair. CANCELLATION: Orders for custom software accepted by Qualtx Technology, Inc. are not subject to cancellation or postponement by the buyer. However, Qualtx may agree in writing to cancellation of all or part of an order upon payment by the Customer of a cancellation charge. The cancellation charge is as follows: 50% of total project TAXES: All taxes and duties are the responsibility of the Customer. Sales Tax will be charged (additional) for Texas and California customers. FORCE MAJERUE: Qualtx will not liable to the Customer for any delay or failure to perform due to causes beyond its reasonable control. Performance time shall be extended for a period of time equivalent to the time lost due to the delay. TECHNICAL SUPPORT: Software bug fixes and minor enhancements are provided to the Customer free of charge for one year from date of initial installation visit. Qualtx Technology, Inc. is defined as a small business. For any questions, please contact Kevin at Qualtx Technology, Inc. kmiller@qualtx.com or 214-578-7712

Condition:

New: A brand-new, unused, unopened, undamaged item in its original packaging (where packaging is applicable). Packaging should be the same as what is found in a retail store, unless the item is handmade or was packaged by the manufacturer in non-retail packaging, such as an unprinted box or plastic bag. See the seller's listing for full details. ...

Country/Region of Manufacture

United States