Genmark GPR-SMV SwampMaster Dual-Arm Vacuum Robot ASM E3000, US $7,499.99 – Picture 0

Genmark GPR-SMV SwampMaster Dual-Arm Vacuum Robot ASM E3000, US $7,499.99 – Picture 1

Genmark GPR-SMV SwampMaster Dual-Arm Vacuum Robot ASM E3000, US $7,499.99 – Picture 2

Genmark GPR-SMV SwampMaster Dual-Arm Vacuum Robot ASM E3000, US $7,499.99 – Picture 3

Genmark GPR-SMV SwampMaster Dual-Arm Vacuum Robot ASM E3000, US $7,499.99 – Picture 4

Genmark Gpr-smv Swampmaster Dual-arm Vacuum Robot Asm E3000

US $7,499.99

Phoenix, Arizona, United States
Jan 30th

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Genmark GPR-SMV Dual-Link Vacuum Robot used on ASM E3000 (Epsilon) EPI Reactors Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Genmark and may vary slightly due to upgrades, options, or revisions this unit may or may not have. 2 units available. The units came from ASM excess stock. It is sold as-is. This unit is believed to be a GPR-SMV but the serial number just said SMV so I am not sure. The Unit's Serial Number Tag Reads: Serial Number: SMV100317 Measured Dimensions: Each Link: 10.25" L Robot Body Size: 14" Diameter x 24" H Description: The GPR-SMV is a high-performance dual-arm vacuum robot employing Genmark Automation's breakthrough GPR technology. The robot combines the functionality of a two-link robotic arm for accurate, repeatable indexing and transportation of semiconductor wafers in vacuum processing capital equipment down to 10E-10 Torr, with the motion of dual arms performing wafer swapping at the process chambers, source cassettes etc. The mechanics of this robot contribute to its simplicity, modular design, easy control, teaching, and programming. The GPR technology makes the robot capable of compliantly interacting with misaligned cassettes and process modules, as well as delivering deflection compensation during wafer transport. Advanced motion planning in continuous smooth trajectories guarantees superior performance and effective implementation in various back-end layouts. Features: Minimizes the idle-time of the process modules due to quicker wafer-swap Advanced motion planning and axes coordination Smallest footprint for its reach, provides the most efficient usage of the available space around the robotic system Radial cassettes / process chambers access capabilities Deflection compensation and compliant interaction with misaligned cassettes DSP-based motion control for vibration –free wafer transport Specifications: Arm Configuration: 2 Link, 6.5" - 6.5" (165.1 - 165.1 mm) - I measured 10.5" L Motion Range: :T-Axis**: 360° R-Axis: 25.6" (650.24 mm) Z-Axis: 3" (76.2 mm) Maximum Velocity: T-Axis: 500°/s R-Axis: 60"/s (1524 mm/s) Z-Axis: 5"/s Maximum Acceleration: T-Axis: 500°/s2 R-Axis: 100"/s2 (2540 mm/s2) Z-Axis: 5"/s2 (127 mm/s2) Resolution: T-Axis: 0.000574° R-Axis: 0.000525" (0.01333 mm) Z-Axis: 0.0000066" (0.00017 mm) Repeatability: T-Axis: ±0.01° R-Axis: ±0.001" (±0.0254 mm) Z-Axis: ±0.001" (±0.0254 mm) Diameter of the Minimum Working Envelope*: 30.5" (655.3 mm) Max. Wafer Size: 300 mm Robot Weight: 247 lb (112 kg) Payload: 12 lb (5.4 kg) For More Pictures Please Click the Following: Picture 2 - Side View #1 Picture 3 - Side View #2 Picture 4 - Side View, Panel Removed Picture 5 - Top View $100.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? For all international customers, the following terms and conditions shall apply: These commodities, technology, or software are to be exported from the United States in accordance with Export Administration Regulations. Diversion contrary to U.S. law is prohibited. Domestic customers must also agree to the following terms and conditions: For items shipped within the United States, MHz Electronics, Inc's performance shall occur entirely within the United States. Unless expressly agreed to by MHz Electronics, this shall not be a routed party transaction. If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. Also, please click here to view or other auctions! 02/09/11 Powered by eBay Turbo Lister The free listing tool. List your items fast and easy and manage your active items.

Condition	Used : An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes	“The units came from ASM excess stock. It is sold as-is. This unit is believed to be a GPR-SMV but the serial number just said SMV so I am not sure.”