Micromanipulator 6200 Manual Probing Station 150mm Wafer Mitutoyo Microscope

US $7,870.00

Santa Fe, New Mexico, United States
Jan 30th

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Micromanipulator Co. 6200 Manual Probing Station for 150mm Wafers This is a Micromanipulator Co. 6200 probe station with Mitutoyo FS-60FC microscope and user manual. Micromanipulator's 6000 series is the most widely used probe station by any manufacturer. First introduced for LSI probing, it has been refined and upgraded over the years and is now used routinely for VLSI probing. Compatible with most of Micromanipulator's extensive line of probes and accessories, the 6000 series is very compact and economical, making it an excellent foundation on which to build a complete probing system. 6200 Probe Station The 6200 Prober is the workhorse 150 mm wafer manual probing station. It is designed to provide an instrument that can find application in both high precision analytical probing and general probing tasks. A vacuum chuck stage (holding surface) is provided for microcircuit wafers. Also provided are coaxial controls for positioning the vacuum stage in either the X or Y horizontal planes. This same stage may be removed and quickly replaced with a different type of stage in approximately one minute. A horseshoe shaped platen on which probe holders are placed is provided. The platen may be raised and lowered, thus providing a means of lifting all probe holders and attached probes simultaneously, prior to lifting the microscope. An adjustable microscope lift point is provided to prevent collision of the probes and the microscope objectives when lifting. This also allows the wafer to be repositioned without disturbing the microscope focus. The platen accepts up to twelve probe holders with either vacuum or magnetic bases. Two, six-output vacuum manifolds are located on the left and right sides of the probe station, just behind the platen. Electrical connection to the probe holders is provided by two sets of color coded connectors, one set on the left and one set on the right side of the platen. Each set consists of two BNC and four three-lug triaxial connectors. Each connector is wired to a corresponding connector situated in two groups at the rear of the baseplate. Each of these connectors are electrically isolated. Grounding connections for both the platen and stage provided via additional BNC connectors, also at the rear of the baseplate. Base and Platen Highly stable machined aluminum base for rigidity with anodized finish for long life Linear platen fast lift with three locking up positions to lift the probes quickly for sample or location changes Platen lift range: 25.4 mm Platen fine lift allows precise control of probe overdrive on all probes simultaneously Platen material: magnetic stainless steel Supports all manual, motorized and programmable probe holders For use with both vacuum and magnetic base probe holders Independent microscope lift Optional accessories allow the 6200 to be used for submicron level probing Connections for probe holders: four BNC and eight three-lug triaxial Connections for grounding: two BNC Vacuum Chuck Stage Gold plated Diameter 152.4 mm Flatness ±0.0127 mm Unlimited rotation with friction lock Travel: 152 mm (X axis), 127 mm (Y axes) Coarse stage control: 40 microns per degree, allows rapid movement from die to die on a wafer Fine stage control: 1.7 microns per degree, for positioning of the test area underneath the probe tips Coaxial controls allow left or right hand operation without cross coupling Electrically isolated to greater than 5000 megohms at 500 V DC Electrical connection provided via binding post located on the underside of the chuck Fast-stage pullout allows rapid repositioning of the wafer chuck for easy load/unload capability Mitutoyo FS-60FC Microscope The probe station features a Mitutoyo FS-60FC high magnification, long working distance microscope. Made for brightfield inspection, the FS-60CF is ideal for observing very minute sections and especially suited for Prober and Failure Analysis Manufacturing applications. The field of view is extra wide and erect. A fiber optic port is provided for illumination and to keep the system free from thermal expansion caused by illumination heat. The microscope is rigidly mounted to provide stability. The mount has an X/Y axis translation allowing the operator to position the microscope independently of the probes or the vacuum chuck stage. Mount Travel: 12.7 mm in both the X and Y axis Body Coarse focus adjustment: 3.1 mm/rot. Fine focus adjustment: 0.1 mm/rot. Focusing travel: 50 mm Erecting trinocular tube Pupil distance adjustment: Siedentopf type, 51 to 76 mm Fixed optical path: 50 mm (observing), 50 mm (photographing) Tube magnification: 1X to 2X changeable by zooming Fiber optic port for illumination Revolving Nosepiece 4 lens mounts Eyepiece Chromatic aberration free High eye point with rubber eye cup Diopter adjustment: -8D to +5D Magnification: 10X Field of View: 24 mm Camera Adapter C-mount for video system/photography unit Click Here to Download More Info on the FS-60FC Calculate Freight Specifications Vacuum Connection 6 mm barb Vacuum Supply 10 to 20 in Hg AC Power 115 V AC, 60 Hz Retail Price $50,167.08 Inspection by a Hofstra Group technician allows us to guarantee this hardware to perform to your satisfaction. This item carries a 7-day unconditional right of return and a 90-day warranty. In the unlikely event that you need to return it, we will arrange and pay for return shipping in addition to refunding the purchase price and original shipping. Please review our Sales Agreement for more information. _gsrx_vers_577 (GS 6.7.5 (577))