Mks 631d/631d13t8fhbb Baratron Heated Capacitance Manometer 133.32kpa 150°c

US $1,599.00

  • Singapore, Singapore
  • Jan 30th
MKS 631D/631D13T8FHBB BARATRON HEATED ABSOLUTE CAPACITANCE MANOMETER 133.32kPa 150°C Product Specifications The Baratron® 631D is the RoHS-compliant version of the high temperature capacitance manometer that MKS Instruments introduced more than 10 years ago. These devices operate at very high internal temperatures that minimize the deposition of process byproducts within the sensor, which nearly eliminates output drift caused by such contamination.  Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). Its new packaging reduces the amount of installation space needed by at least 40%, making it even easier to design into new systems or retrofit into existing equipment.  The 631D is completely self-contained, requiring only input power of ±15VDC for operation. No separate electronics modules are used, which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion, and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions.  The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available, allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during setpoint adjustment.  Features & Benefits:  Operating temperatures reduce contamination  Compact design & self-contained electronics save space  Inconel® sensor resists corrosion Insensitive to gas composition  Performance is unaffected by pressure bursts  Optional pressure trip relays (2) for controlling external equipment  Applications:  The 631D Baratron High Temperature Manometer is found in demanding vacuum processes for semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). It is also an ideal choice for use in biopharmaceutical processing equipment such as lyophilizers and sterilizers that use steam to prevent bacteria growth. Product Website Product Datasheet Product Specifications Unit's Specifications Make: MKS Instruments Model: 631D13T8FHBB Fitting: Swagelok® 8 female VCR®, 2.10 inch (53.3 mm) FullScale Pressure Range: 1000 Torr (mm Hg) Operating Temperature: 150 Degree Celcius Trip Relays: Yes Range: 133.32kPa You will receive the actual/exact unit as shown Description This unit is used and in overall good physical condition. It was pulled from a working environment. As we do not have the technical expertise to further test the unit, we are selling it on an "AS IS BASIS". Shipping We ship worldwide. Please email us for a shipping quote My Store | Follow us on Twitter for Real-Time Inventory Updates | Contact Us
Condition Used :
An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes Used, in good physical condition, pulled from working environment

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