Ssec 3302 Single Wafer Chemical Etch Processor

US $131,250.00

  • Freehold, New Jersey, United States
  • Jan 30th
SSEC 3302 Single Wafer Chemical Etch Processor Inventory # 59522 *****Before purchasing this system, please note that the refurbishment process does not begin until the equipment has been purchased. Please contact us for lead-time.*****  60 in. W x 76 in. D system fully contained (+Neslab). White epoxy painted, stainless steel Series 3 frame construction. FM 4910 compliant plastic enclosures, bottom lining and processing modules. PC based control system. Two horizontal cassette loader for continuous operation. Integrated wafer scanner and teaching system. Non-contact wafer alignment system PC programmable for 150mm and 100mm wafers. Molded, Etch and Clean Processing Chamber (Station 1): 18 in. inside diameter, molded HALAR processing chamber. WaferChek real-time process monitoring and control. Chemical Delivery System: Three programmable fan dispense arms with 100 percent surface coverage. Arm 1: DI:KOH etch to PC programmable temperature 100 deg C, +/-0.5 deg C. Arm 2: DI rinse, stream. Arm 3: Electronic, heated, 0.003 microns filtered, nitrogen blow assist. Programmable chamber wash with DI water. Chamber wall dispense with fully adjustable nozzle. Molded, Etch and Clean Processing Chamber (Station 2): 18 in. inside diameter, molded HALAR processing chamber. WaferChek real-time process monitoring and control. Chemical Delivery System: Three programmable fan dispense arms with 100 percent surface coverage. Arm 1: HF:HNO3 etch with nozzle tip fluid collection for standby recirculation. Dispense A: Recirculated, PC programmable HF:HNO3, PC programmable stream to 1L/minute. Arm 2: DI rinse, stream. Arm 3: Electronic, heated, 0.003 microns filtered, nitrogen blow assist. All dispense arms are fully programmable by individual process step. Can be sold in untested as-is condition, or fully checked out and refurbished by one of our technicians, with our standard right to return and 3 month parts warranty. Please contact us directly for as-is pricing. Please contact us for additional information on this system, including lead-time, or for any questions via eBay mail or at phone # (732) 863-9500. BID SERVICE has been meeting the equipment needs of the Semiconductor and Scientific communities for the past 30 years. Our expert refurbishing services, demonstration capabilities, and broad selection of inventory add up to value for our customers.
Condition:
Seller refurbished: An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details. ...
Brand SSEC
Model 3302

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