Surface Technology Systems Mxp Multiplex Icp Ase Hr Silicon Etcher

US $215,000.00

  • Schenectady, New York, United States
  • Jan 30th
Surface Technology Systems MXP Multiplex ICP ASE HR Silicon Etcher Specifications: Process: Silicon Etch Bosch Wafer size range: 50 mm to 200 mm Set size: 150 mm Loadlock with Edwards E2M40 Vacuum Pump High vacuum pump: Pfeiffer MAG 2000 Roughing vacuum pumps: Edwards IQMB250 and IQDP80 RF Generator: ENI Power Systems ACG-3B and Advanced Energy RFG 3001 Number of gas inputs: 4 Process gases: SF6, C4F8, O2, Air Huber/Unistat 140W Chiller Accessories: ICP V2 - Balun coil Mechanical Clamp Helium Backside Cooling Carousel in MkIV MPX - 2 x 150mm wafers 3KW Source 300/30W platen E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2 Windows 2000 Bosch license CE Marked Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase. Manufactured in 2003. This system has not been tested.   The equipment we sell is made fully functional and sold with our 90-day parts warranty, unless stated otherwise.   Once an order is received the system will go through our testing/refurbishing process.  Please contact us for lead time. Potential buyers are more than welcome to visit our facility to inspect the equipment prior to purchase.  Note that items will not be operational in this instance.   We also encourage our customers to visit our facility for the final source inspection and sign off on equipment being purchased. Please contact us at 518-346-8347 or email us at cbi@capovani.com for additional information. Shipping and handling costs are the responsibility of the buyer.  We cannot quote actual shipping and handling costs, until the item is prepared for shipment.   We sell internationally, however some equipment cannot be exported to certain countries, companies or individuals, due to US export control regulations.  We are unable to accept credit cards or PayPal for purchases of this size. Payments can be made via wire transfer or via company check, with approved credit.  Payment arrangements can be discussed on a per transaction basis. Please ask any questions prior to bidding.  By placing a bid you agree to all stated terms.  
Condition:
Seller refurbished: An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details. ...
Brand Surface Technology Systems

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