Suss Microtec M6000l Lift Off System

US $3200

  • Decatur, Georgia, United States
  • Jun 22nd
For more information or to schedule an inspection, please contact us. This system includes a Lift-Off Process Chamber module, high-pressure dispense arm, fan jet nozzle, N2 backside rinse, stainless steel filters, and pneumatically controlled centering jaws, all driven by an indirect AC servo motor. Designed for the lift-off process, recirculated NMP medium is dispensed by a high-pressure (thermo-controlled) and/or fan spray nozzles (thermo-controlled) followed by DI water rinse via a puddle nozzle in a separated rinsing station. Our telephone number is 678-321-SEMI, and our email address is alex@ClassOneSurplus.com. The asset number for this system is 1622063635. The system is sold "as-is" and is available for inspection by appointment. The SUSS M6000L Lift-Off System, manufactured by Suss MicroTec, is a process used for removing resist and metal from 3" to 6" diameter wafers. The system also features a Send/Receive Module, System Robot, and Rinse Module with two tanks for fresh and used NMP, a chemical delivery cabinet, and emergency off (EMO) with two chillers.

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