Akrion Systems Quartz Recirculated Megasonic Tank

US $10,575.00

  • Albany, Oregon, United States
  • Jan 30th
This item is a Quartz Recirculation dual Phaser megasonic tank built for Akrion Systems Gama wet stations for SC1 processing. The tank is sized for 200mm teflon wafer cassettes used with active robot grippers. The tank is in excellent condition and includes built in flow bars for incoming recirculation in the inner weir. The tank has dual 3/4 inch flare fitting input connections on the front end of the tank and a third 3/4 flare connection for draining. The outer weir has a 1 inch flare connection. This tank will be hard cleaned to remove organics, particulates and metallic/ionic contamination. The tank will be packaged for shipment in a cleanroom and ready for installation. Typically used on Gama wet process tools built by Akrion Systems. We removed this tank from Akrion Project # 325-04 and have two in stock.    
Condition:
Seller refurbished: An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details. ...
Brand Akrion Systems
MPN 200mm Dual Cassette
Model Gama Wet Station

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