Amat P5000 Mxp+ Oxide Etcher.

US $70,000.00

  • Osan, default, Korea, South
  • Mar 6th
6"wafer size. Maker: AMAT Model: P5000 Vintage: 1997 S/N: 7358 Config  2x MXP+ Oxide Etch chamber ( ESC Simple Cathode)  1x Orient chamber Storage: 8 slot Elevator.  Slit Valve: ZA Slit Valve Turbo pump: Ebara ET300WS EPD: Monochrometer type. Gate Valve and Throttle Valve. MFC: Unit / CF4,N2,O2,CHF3,AR Chiller: Nealab HX150.
Stock in warehouse in Korea. 2015/03.
Brand AMAT
Country/Region of Manufacture United States
Model P5000

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