Astex Astron Ax7651-2 Plasma Generator P/n:0920-00013 S/n:10421 Rev.d D/c:1101

US $3,500.00

  • Colorado Springs, Colorado, United States
  • Jan 29th
MFG: ASTEX MODEL: ASTRON AX7651-2 P/N: 0920-00013 S/N: 10421 REVISION: D D/C: 1101 NAME(S): PLASMA GENERATOR, PLASMA SOURCE, PLASMA SOURCE GENERATOR, REMOTE PLASMA GENERATOR LOCATION: 202D-5 **UNABLE TO TEST**AS-IS* ASTRON Source Model # Name Operating Pressure (T) Operating Flow (SLM) Dissociation AX7651 2L 1 - 8 0.1 - 4 (0 - 50% NF3) > 95%, 5 - 8 T, up to 2.5 SLM

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