Atv Technologies Peo-601 Benchtop Vacuum Furnace

US $4200

  • Manchester, New Hampshire, United States
  • May 26th
ATV Technologies PEO-601 Benchtop Vacuum Furnace RF-2028 ATV Technologies PEO-601 fast ramping bench top vacuum process furnace, quartz glass process tube holds up to 40 100mm wafers, maximum temp 1150C, fast ramping up to 100C/min, fast cool down, vacuum to 5x10E-6mbar, less then 1ppm oxygen, 100 step process controller, applications include wafer bump reflow, polyimide cure, SiAu, SiAL, SiMo alloying, post implant diffusion, LPCVD, wet/dry thermal oxidation, thick film paste firing, Si epitaxy, 220v/3ph.    

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