Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 0

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 1

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 2

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 3

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 4

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 5

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 6

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 7

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 8

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 9

Brooks Automation SENTRY 9000 Exhaust Flow Controller w/TIM-100. Wafer Track Typ, US $4,249.99 – Picture 10

Brooks Automation Sentry 9000 Exhaust Flow Controller W/tim-100. Wafer Track Typ

US $4,249.99

Phoenix, Arizona, United States
Jan 30th

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Click Here. Double your traffic. Get Vendio Gallery - Now FREE! Brooks Automation / Progressive Technologies SENTRY 9000 Automated Exhaust Flow Controller for Wafer Track Systems Comes with what you see in the pictures. If you don't see it, you probably wont get it. The units is believed to be new, old stock off the shelf. The controller portion has spots that look like water spots on the pressure transmitter portion. List Prices are: Part Number: 12042-P Price: $3,090.00 with a 6-week delivery time from the factory Part Number: 12035G01: Price: $9,950.00 with a 5-week delivery time from the factory Total List Price is: $13,040.00 NEW The Sentry 9000's Serial Number Tag Reads: Product: Sentry 9000 Type: Automated Part Number: 11951G01 Revision: 3 Serial Number: 0602-11069 Operating Range: 4 - 35 SCFM (110 - 990 SLM) Accuracy to Set Point: ±5% Minimum House Exhaust: 2.5" (64 mm H2O) With Booster Fan: 0.75" (19 mm H20) CE Marked: Yes The Tool Interface Module's Serial Number Tag Reads: Product: TIM-100 Part Number: 12042 Revision: 02 Serial Number: 18543 Power Requirements: +15 to +24 VDC, 650 mA, -15 to -24 VDC, 50 mA Set Point Control Types: 0 to 5 Volt Analog RS 422/485 Serial Interface Stand alone using operator keypad The unit is configured with parameters for a Sentry 9000 35CFM Link to the Datasheet: Brooks Automation Sentry 9000 Exhaust Flow Controller Datasheet Description: The SENTRY 9000 Automated Exhaust Controller, with the TIM (Tool Interface Module), is ideal for tracks with lower flow requirements, such as some SVG tracks. Multiple set-point capability allows different flows for different steps in the process or for different processes. Constant, stable exhaust reduces splashback. The SENTRY 9000 also effectively isolates the chamber from the effects of other chambers, so there is no cross-talk. For DUV processing, the SENTRY 1000 prevents the backstreaming of contaminants that desensitize DUV resist. Reduced splashback and chamber isolation combine to reduce wafer contamination and reduce resist sensitivity. The optional Fast Set Point feature enables the exhaust controller to change set point in less than 0.5 seconds. By learning stepper motor positions for recipe set point, the TIM commands the stepper motor to the last good position, for a rapid transition from one set point to another. In case of drift or changing system dynamics, the software is adaptive, recognizing and recording the new position for future use. Features: Simplicity Integrated software for all major track tools Point-of-use air-flow regulation with millisecond response time Multiple, automatically controlled set points Analog or digital control Real-time trend chart of actual pressure/flow Real-time, numeric read-out of set point, process pressure/flow, and stepper motor position Networkability Optional menu-driven programming Optional fast set point control Benefits: Reliable, fail-safe operation Flexibility Stable exhaust for: Improved coating uniformity Reduced defect density Enhanced DUV sensitivity Better CD control Less contamination Improved repeatability Reduced splashback Smaller edge exclusion Outgassing isolation Energy savings Fastest response to set point change (with Fast Set Point Feature) Adaptive software (with Fast Set Point Feature) Primary Applications: Coat Develop Hot Plates Specifications: Flow Rate Range: 4 - 35 CFM (113 - 991 LPM) Input O.D.: 3" (76 mm) Output O.D.: 4" (102 mm) Exhaust Required (without booster fan): Minimum 2.5" of water column for maximum flow rate (622 Pa) Accuracy to Set Point: ±5% Response Time to Fluctuation: 50 milliseconds to fluctuations of 100% Materials: Teflon, Stainless Steel, Aluminum, Polyethylene, Epoxy Controller Dimensions: 11.33" L x 8.00" W x 11.84" H (288 mm x 203 mm x 301 mm) TIM Dimensions: 8.32" L x 5.41" W x 2.33" H (211 mm x 137 mm x 59 mm) Controller Weight: 22 lbs. (10.0 kg) TIM Weight: 2 lbs. (.9 kg) Power Options: DC Supply: +15 to +24 VDC, 650 mA and -15 to -24 VDC, 50 mA Control Types: 0-5 Volt Analog RS422/485 at 9600 baud Stand Alone Operator Keypad For More Pictures Please Click the Following: Picture 2 - Sentry 9000 - Side View #1 Picture 3 - Sentry 9000 - Side View #2 Picture 4 - Sentry 9000 - Side View #3 Picture 5 - Sentry 9000 - Side View #4 Picture 6 - Sentry 9000 - Top View Picture 7 - Sentry 9000 - Bottom View Picture 8 - TIM - Front View Picture 9 - TIM - Top View Picture 10 - TIM - Bottom View Picture 11 - TIM - Side View Picture 12 - Sentry 9000 - Part Number Tag Picture 13 - Sentry 9000 - Serial Number Tag Picture 14 - TIMS - Serial Number & Part Number Tag For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $25.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. Also, please click here to view or other auctions! 01/01/09 Powered by eBay Turbo Lister The free listing tool. List your items fast and easy and manage your active items.

Condition	New other (see details) : A new, unused item with absolutely no signs of wear. The item may be missing the original packaging, or in the original packaging but not sealed. The item may be a factory second or a new, unused item with defects. See the seller’s listing for full details and description of any imperfections.
Seller Notes	“The units is believed to be new, old stock off the shelf. The controller portion has spots that look like water spots on the pressure transmitter portion.”