Drytek Cassette Planar Plasma Wafer Etcher System Drie-100

US $5600

  • Ventura, California, United States
  • Jan 30th
Drytek Cassette Planar Plasma Wafer Etcher System DRIE-100 Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+ Low energy etching for minimal substrate damage. Excellent selectivity, e.g., 20:1 poly Si:SiO2 Laser interferometer for etch rate determination and end-point detection. Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit Link to Web Page Various Accessories & Wafer Holders Included Complete Manuals Included Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump Available $1995 This item was pulled from a high end cellular equipment manufacturer and appears to be in good condition. It is sold "as is" with no warranty. Only those manual or peripherals are included. SKU 19334
Condition For parts or not working :
An item that does not function as intended and is not fully operational. This includes items that are defective in ways that render them difficult to use, items that require service or repair, or items missing essential components. See the seller’s listing for full details.
Seller Notes This requires Freight Shipping, please contact us for rate. This item is being sold in As-Is condition and includes many useful parts. Please review description and photos and contact us with any questions.

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