Fib Focused Ion Beam Lithography Implanter 4-300kev, Gdsii, Sub 20nm

US $760,000.00

  • San Juan Capistrano, California, United States
  • Feb 14th
  Fully functional high energy, species selectable focused ion beam lithography/implanter capable of wafer registration and GDSII patterning to the 20nm node General Description The Nanofab 150 is a fully functional, high energy focused ion beam lithography/implanter system with integrated laser position stage and the ability to handle 150mm wafers and minimum beam spot size to 20nm.  The system operates at energies from 4 to 150keV (300keV double ionization) leveraging ExB filter to use liquid metal ion sources (Ga, Si, Ge, In, Be, Au, As, B, Pd, Bi).  Pattern data input is converted from standard GDSII format to a minimum sub 10nm addressing.  Registration is performed to standard industry ASML marks with overlay to 45nm 1sigma.  The system is ideal for fundamental research or custom wafer modification.  Installation and field service are available as a separate service contract.  This sale is for the base unit.  Software and hardware upgrades available for additional service contract, including 200mm wafer handling, improved registration software, improved optics, vibration isolation and vacuum system, additional ion gun assemblies, column assemblies, and a wide range of wafer size pallets, mask cassettes, sample size pallets and spare parts. Features Operation with elemental and alloy sources Selection of ion species using ExB mass filter Target imaging with secondary electrons Completely automated operation Write-on-the-fly patterning Up to 5A/cm2 beam current density 4keV to 150keV, continuously adjustable ion beam voltage Universal mount for replaceable liquid metal ion sources Electronically selectable ion beam mass filter, M/deltaM >/=50 Computer controlled, stepper motor driven substrate state 165mm x 165mm travel, 1nm resolution laser position monitor System Footprint Main High Voltage/Chamber: 110"x56" Utility Support Module: 31" x 46" Operator Console: 31" x 46" Please read the following terms of sale carefully.  These terms constitute a legally binding agreement (contract) between the seller and buyer. By bidding on, or purchasing, the product posted in this eBay listing, the winning bidder agrees to and accepts all of the terms of sale as stated below. TERMS OF SALE: Only what is shown in the eBay photo and mentioned in the listing is included, nothing else is included. All sales are final, please understand that this is an auction/liquidation environment, and as such, all sales are as-is, with no warranty unless indicated in the individual listing. Photographs in the listing are usually the exact item being sold.  Occasionally, when we have more than one of the same item, the photograph is representational of the lot, and not an image of the actual item being sold. WARRANTY: These are liquidation items and as such, are not guaranteed.  All of our items are coming out of our lab and are therefore used, unless otherwise noted. All items are sold as-is, where-is without warranty or guarantee, unless specified in the auction details.  Likewise, ALL SALES ARE FINAL. Please ask all pertinent questions regarding the condition of the item before making your bid.  We do not accept returns and will not refund payment based on the bidder’s incomplete understanding of the item description or not wanting the item after making a bid.  Pre-Shipment Operational Verification Fee: Pre-shipment operational verification can be performed at our facility for a 20% non-refundable deposit as a separate service contract. PAYMENT: We accept payment by Paypal, and we only ship to the address which the buyer provides within the Paypal payment, no exceptions. If you are local and would like to pay by cash or cashier’s check, please contact us BEFORE bidding to arrange. Buyers are given 7 days from winning bid to pay, and payment is expected of all winning bidders. If no payment is made within 7 days, an unpaid item reminder will be filed with eBay, and the buyer forfeits the auction win. We are required by state law to collect sales tax on all items shipping to a CA address.  We will use the sales tax appropriate for the county to which the item is shipped.  You will be required to pay the tax when you pay for the item.   Please contact us BEFORE paying if you feel the sales tax is not correct. CA sales tax may be waived with a valid CA resale certificate - please contact us for resale exemption BEFORE payment.  If we do not receive your resale certificate before sending payment, and we are shipping to a CA location, we will not waive sales tax. DOMESTIC (US) SHIPPING: Local pickup is available; please contact us first to arrange a pick-up time.  Payment MUST be made before a pick-up time can be arranged. FREIGHT SHIPPING: Oversized items (150+ LBs) may be picked up locally, or may be shipped freight, but scheduling the freight shipment is buyer's responsibility. Freight shipping is from zip code 92675, commercial location, NO forklift available for loading, and outgoing shipments may be scheduled from 10AM-5pm on weekdays. We can prepare the shipment for you upon request, palletizing, strapping down, and/or shrink-wrapping, there is a palletizing fee. Bill of lading must be provided to us at least 24 hrs in advance of scheduling shipment, and ship-to address must match the shipping address in your Paypal payment. FEEDBACK: Before leaving neutral or negative feedback, please email instead, all issues can be resolved by communicating, we prefer to have satisfied customers COMMUNICATION: All communication is by email only, not phone - please use the "Ask seller a question" link in the auction page. All reasonable emails will be replied to, please allow 24-48 hours for a response, and check your email filter if you don't see a reply within 48 hours. Saturday, Sunday, and holidays are not business days so no reply should be expected during the weekend
Fully functional
Brand Microbeam
Country/Region of Manufacture United States
Model Nanofab 150

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