Innotec High Vacuum Batch Sputtering System Chamber Ds-28c

US $11000

  • Ventura, California, United States
  • Jan 30th
Innotec High Vacuum Batch Sputtering System Chamber DS-28C This Innotec DS-28C High Vacuum Batch Sputtering System Chamber is not complete and being sold for refurbishment or as a spare parts machine. It came from a a mems R&D fab who no longer needed it. Power rating: 208 VAC, Phase-3, 60 Amps, 60 Hz Burton Transformer, SPEC # 16845. PRI: 208 / 240 VAC, SEC: 117 VAC, 1.5 kVA Components inside/attached to chamber: QTY = 1: ITT Jennings CVCJ-1000-3S, 7-1000PF, 3000Volts QTY = 1: ITT Jennings CSVF-500-000, 12-500PF-10KV QTY = 1: ITT Jennings CVDD-1000-15S, 25-1000PF-15KV QTY = 1: ITT Jennings CVDD-500-15S, 20-500PF-15KV QTY = 1: MKS Mass Flow Meter 1279A22CR1BV Upper chamber dimension: appx 27" Diameter x 17" Tall Lower chamber dimension: appx 21" Diameter x 20" Tall Electrical Components: QTY = 1: DISON Technologies PWP AMC068 / CCA AMC069 Controller Card/Board QTY = 1: Innotec Voltage Panel Meter QTY = 2: Innotec AMT Panel Controller QTY = 1: Innotec Hoist Control Panel QTY = 2: RF Blower Incident & Reflected Power Meters, model # 7900006010 MEIVAC Vari-Q Throttle Valve VQ-6-ASA-T-PA Superior Electric Stepping Motor, Type: SS50G20 SKU 40888
Condition Used :
An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes This requires Freight Shipping, please contact us for rate. This item has been inspected and appears to be in good condition

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