IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 0

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 1

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 2

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 3

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 4

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 5

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 6

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 7

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 8

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 9

IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System, US $37,899.00 – Picture 10

Ipec Speedfam Novellus Pws Soi 200/200mm Plasma Enhanced Chemical Etching System

US $37,899.00

Union City, California, United States
Jan 30th

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IPEC Speedfam Novellus PWS SOI 200/200mm Plasma Enhanced Chemical Etching System Outstanding Condition Includes: Full vacuum system Integral ADE AcuMap II Edwards ADE 31 Pump Affinity Chiller (208v/ 3 Phase) Transformers Controller Stand with Controllers Interconnect cables Full Set of Documentation Manuals Available for inspection Please Email with questions From the Manufacturer: Plasma-Assisted Chemical Etching Summary: A BMDO-sponsored non-mechanical process to shape and polish optical surfaces, called plasma-assisted chemical etching (PACE), is now being used for precision shaping of ultra-flat silicon wafers and silicon-on-insulator (SOI) wafers. The process has resulted in three products whose total sales topped $10 million in 1997. Technology Description: In 1985, the Perkin-Elmer Corporation (Norwalk, CT) developed a non-mechanical process to shape and polish optical surfaces. This process, called plasma-assisted chemical etching (PACE), is now being used for precision shaping of silicon and silicon-on-insulator (SOI) wafers. In PACE, a plasma-excited reactive gas chemically combines with the surface material to generate a volatile product that removes a highly predictable and controllable amount of the substrate. A high-speed, thin-film mapper begins the process by measuring the film thickness at thousands of points. The map is used to determine the amount of substrate that needs to be removed at each grid point to achieve uniformity across the wafer. The material is then placed on a programmable stage in the PACE processing chamber where it moves under the spatially confined plasma etch tool. A scanning mechanism is used to control the material removal at each location on the wafer by varying the amount of time the plasma tool head “dwells” at each point. The plasma contains ions, free radicals, and neutral species, all with low kinetic energies. Vertical etch rates of over 100 micrometers per minute have been demonstrated in silicon. These etch rates allow wafer processing speeds comparable to other semiconductor fabrication processes, in spite of the smaller instantaneous area covered by the PACE plasma head. Another benefit of PACE technology is its ability to precisely thin silicon without damaging or contaminating the wafer. In addition, the reactants used in the PACE process are gases common to other semiconductor processes, such as sulfur hexafluoride. Spinoff Applications: The PACE technology was originally developed to shape and smooth optical surfaces. It can fabricate aspheric optical surfaces (which provide better image resolution and wider field-of-view in optical systems than standard spherical-shaped mirrors, but are more difficult to make), synchrotron mirrors, and telescope mirrors. Currently, PACE is being applied to high-speed, low-cost precision shaping of ultra-flat silicon wafers and SOI wafers. Ultra-flat wafers can solve critical depth-of-focus problems in optical lithography processes used to fabricate advanced devices with line widths below 0.35 micrometers. SOI wafers are used as substrates for low-power dissipation electronics at the 256 megabit generation of devices and beyond. Commercialization: IPEC Precision, Inc., now designs and manufactures PACE wafer processing equipment, as well as wafer metrology equipment. The company targets two emerging semiconductor materials markets, ultra-flat silicon and SOI, with the following commercially available wafers and equipment: •AcuThin® SOI wafers and equipment (SOI-200): The SOI-200 system allows wafer manufacturers to precisely etch thin-bonded SOI wafers up to 200 mm in diameter with active thicknesses down to 1,000 angstroms and thickness uniformities of angstroms within a wafer, and wafer to wafer. Using PACE technology, the SOI-200 attains active SOI film dimensions not possible with conventional thinning technology. •Ultra-flat wafers and equipment (PWS-200/300): The PWS utilizes PACE for controlled etching of silicon to achieve uniform thickness (flatness after vacuum chucking). IPEC Precision has used PACE for several years to produce ultra-flat silicon wafers up to 200 mm in diameter. Recent advancements in metrology have extended this performance to 300 mm diameters. AcuMap II Is Full Wafer Mapper Capable ADE Corp. AcuMap II is a film measurement and visualization system that provides a powerful, cost effective alternative to conventional film thickness measurement systems. The AcuMap II is a full wafer mapper capable of providing up to 40,000 film measurements across a wafer in less than 90 seconds, says ADE. It has no moving parts to scan. AcuMap II maps dielectric films and is compatible with 100-200 mm wafers. Please contact us for shipping estimates. Check Out: *Purchase: Making purchases is easy and simple. To place an order for procurement, please click the “Buy It Now” button. Follow to the next page for payment instructions. *Payment: Click the “Pay Now” button at the top of the E-Bay page to proceed with the checkout and payment process. Payment must be made within 5 days of purchase. *Accepted Forms: We accept PayPal, or you may pay on your credit card via PayPal. When paying via PayPal, payments must include your shipping address and should be submitted via the E-bay payment process. Sales Tax: *For California customers, sales tax is added and depends upon your location. If you are tax exempt, please provide a copy of your Tax Exempt Certificate prior to check out. Please do not send payment before receiving a revised invoice. Shipping: *Shipping rates are the responsibility of the customer and are not refundable. Rates include handling, packaging materials, label scanning and tracking information. Shipping rates are based upon the weight and dimensions of the package and your location. If we have packaging materials for smaller items, we include packaging and handling at no charge. If they are unavailable, we charge our cost. For larger capital equipment, please contact us for crating costs and exact weight prior to shipment as the crate will add weight to the tool set. *Insurance: Should you prefer insurance on your item, please inform us PRIOR to check out so this may be added to the shipping cost. Insurance is not added unless specifically requested by the buyer. *Processing Time: Once payment has cleared, we make every effort to ship your item within 1-2 business days. Larger capital equipment which requires crating may require a longer time to build the crate. *Freight Shipment: Freight Shipment is the responsibility of the buyer, although we will do everything possible to assist you with this process. There may be rigging, crating or palletizing charges depending upon the item purchased. Please contact us for additional information on the item you purchase. *Local Pick Up: Local pick up is available on most items. Please contact us to arrange pick up for your items. *Shipping Account: If you would prefer to use your shipping account, please let us contact us. We are happy to do so. *International Shipping: International shipping is determined on a case by case basis. We reserve the right to refuse shipment to certain locations/customers if all our requirements are not met. All documentation and customs reports are to be prepared by the purchasing party and provided prior to pick up. 48 Hour notice is a minimum required notice prior to International pick up. Insurance is required on all International orders. Customer Service: *Inquiries: Please contact us with any questions you have on any listed item. While we are closed over the weekend, we will make every effort to answer your questions as soon as possible. Most questions are answered in less than 24 hours. Warranty: *Products are sold As Is, Where Is: All items are sold As Is, Where Is, without warranty expressed or implied unless specifically stated in the posting. This does not mean that the unit does not work, only that we have not tested it or check it out. This also may mean that we are not knowledgeable in a certain item. *All Sales are Final: All sales are final. Please ask any pertinent questions regarding the condition before you purchase your item. We reserve the right to refuse a return based upon not understanding the description or not wanting the item. *DOA Terms: An item said to be in working condition but received Dead on Arrival (DOA) can be returned for exchange or refund (when no exchange is available) within if we are notified within 7 days of receipt of product. Compensation will be provided upon return of item, physical examination, testing and serial number verification. If any one of these items are not met, we reserve the right to withhold funds for an indefinite time until all requirements are met. *Return Shipment: All items must be in the same condition as when they left our facility. For claims, it is required that original packaging materials be retained and returned with the defective product. If the item has been changed or tampered with in any way, from original condition, we reserve the right to refuse refund. Upon receipt of the unit we will fully test the item in question, visually inspect the condition and verify the serial numbers. If the state of the item is not as was described in the listing, we reserve the right to refuse refund. If it is evident the item was damaged due to improper installation or use, we reserve the right to refuse refund. All returned shipments should be properly insured. We will not honor claims for any items which were uninsured and damaged during return shipment. *Auction Pictures: Some auction pictures may be representational only and not the exact items we will ship (particularly if we have a quantity of more than one listed).

Condition	Used : An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes	“System currently purchased from a fab in operational condition. Excellent condition, many more pictures available.”