KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 0

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 1

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 2

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 3

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 4

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 5

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 6

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 7

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 8

KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS, US $9,499.99 – Picture 9

Kla-tencor Surfscan 4500 Surface Contamination Analyzer/monitor Sfs

US $9,499.99

Phoenix, Arizona, United States
Jan 30th

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KLA-Tencor Surfscan 4500 Surface Contamination Analyzer/Monitor SFS Comes with what a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Tencor and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This unit powered up and passed it's self-test. I can not test it after that as I do not have a wafer or cassette to use. The start button key is a little loose. The unit is sold as-is! The unit has a stainless steel bench that is optionally included. The Unit's Serial Number Tag Reads: Model Number: 70-01500 Serial Number: 0987-175 List of Boards In Card Cage (From Left to Right, 1-16): Slot 1: Matrox, Model Number: STD-800/64/20, Serial Number: 581, Revision: 2 Slot 2: DY4 Systems, Part Number: OY00469-H-AI-304D, Serial Number: 130452 Slot 4: CDI, Model Number: CPU-9, Serial Number: 07796 Slot 6: SPC, Model Number: SPC-STD503-000-001, Serial Number: 027 1246, Revision: 2.0 Slot 8: DY4 Systems, Part Number: PD-STD503-000-001, Serial Number: 146314 Slot 10: DY4 Systems, Part Number: DY00485-H-AI-3 / DSTD103004, Serial Number: 136956 Slot 12: Tencor, Part Number: 058457, Revision: C Slot 13: Tencor, Part Number: 077054, Serial Number: 008031, Revision: H1 Slot 15: Tencor, Part Number: 128066, Serial Number: 018302, Revision: D Slot 16: Tencor, Part Number: 054135, Revision: I List of Additional Boards in the System (that I could see): Tencor, Part Number: 055972, Serial Number: 008211, Revision: N Tencor, Part Number: 080810, Revision: K1 Laser Information: Model Number: 1103P-0613 Serial Number: 1334858 Date of Manufacture: January, 2001 Description: The Surfscan 4500 measures the size, number, and location of wafer particles with scattering cross-sections from .006 µm2 to 1024 µm2. It features a robotic substrate transporter. After fetching the wafer, the puck transports it inside the scan housing for measurement. Data appears on the monitor as the scan progresses. When the scan is complete, the puck returns the scanned wafer to the receiver cassette. Features: Submicron Sensitivity - System sensitivity, measured with latex spheres on a bare silicon wafer, is 0.2 µm diameter. Non-Contanming Wafer Transport - Robotic handler with vacuum puck eliminates contamination associated with belt handling. High Efficiency Elliptical Mirror Light Detection - Patended elliptical mirror detection system maximizes the collection of scattered light while minimizing noise from background light. Fully Digital Signal Processing - High-speed digital signal processing (16 MHz) produces Particle Maps, Histograms, and Haze Maps with X-Y particle addressing and 8-bit-size resolution. Menu-Driven Operation - Color-keyed data, help, and set-up screens simplify operation. Automatic Calibration - An internal scattering standard is monitored through a closed-loop feedback system to compensate for effects of photomultiplier drift, laser aging, and other long-term circuit drifts. System calibration is maintained 400 times per second. Automatic Zeroing - A zero-scattering standard is referenced after each laser scan to ensure that measurements are independent of ambient light level. Overload Protection - The photomultiplier is automatically disabled whenever the scattered or ambient light level exceeds detector limits. This prevents overload damage and invalid readings. Pulse Position Correlator - Enables particle counting classification to determine particle count with high precision. The PPC allows Area Zoom capability. HEPA Filter System Purging Purifies air entering the instrument by removing airbone particles. Specifications: Measurable Materials and Ranges: Substrate Diameter: 2-inch, 3-inch, 100 mm, 125 mm, and 150 mm. Substrate Thickness: SEMI standard wafer thickness. Material Type: In the most sensitivity range, any opaque, polished surface that scatters less than 0.025% of incident collimated light averages over the substrate. In the least sensitive range, any surface that scatters less than 10% of incident light. Particle Sensitivity: 0.2 µm diameter latex spheres on bare silicon substrate. (This corresponds to approximately 0.015 µm2 light-scattering cross-sectional area.) Haze Sensitivity: 0.4 parts per million with 0.1 ppm increments. Spatial Resolution: Minimum spacing of 50 µm between particles. Particle Range: The MAX SIZE values are [µm2]: .256, .512, 1.024, 2.56, 5.12, 10.24, 25.6, 51.2, 102.4, 256, 512, 1024 Count Accuracy: Better than 1%, as measured on a VLSI Standard's relative standard. Repeatability: Particle counts repeatable to 1% or less, independent of wafer orientation. (Mean count of 500 particles, 1 µm diameter latex spheres.) Contamination: No more than two particles with scattering cross-section greater than 0.5 µm2 per 50 passes. (with 97% confidence). Measurement Speed and Throughput: Scanning Beam: Cycle of 400 laser scans per second. Light Source: Helium-neon laser; 2 mW; wavelength (λ) = 6328 Å Substrate Speed: During scanning, forward motion at a rate of 10 mm/second. Throughput: For a 100 mm wafer, feth-measure-munload cycle, 50 seconds. Operating Modes: Automatic Mode: Automatic Mode automatically subjects all wafers in a cassette to the same parameter values. This is used primarily with cassette-to-cassette handling and sorting of 3-inch, 100 mm (4-inch), 125 mm (5-inch), and 150 mm (6-inch) wafers. Manual Mode: Manual mode facilitates detailed analysis of individual wafers from a cassette. This is used primarily for cassette-to-cassette handling of the same substrates as Automatic Mode; however, each scan must be initiated separately. Data Output: Monitor: High Resolution Color Monitor Parallel Data Output Port: Parallel interface to either the 80-column or 20-column printer. For dual 20/80-column printer operation, a switch box is recommended. External Printer: Okidata 292, Epson FX-85 and Citizen HSP-350 80-column printers and Digitec 20-column alphanumeric printers are supported. Physical Characteristics: System Weight: 94 kg (206-pounds) Scan Unit Weight: 84 kg (184-pounds) Monitor Weight: 10 kg (22-pounds) Dimensions: 127 cm W x 61 cm D x 64 cm H (50" x 24" x 25") For More Pictures Please Click the Following: Picture 2 - Back View Picture 3 - Left Side View Picture 4 - Monitor, Showing System Setting Picture 5 - Inside the Scan Housing Picture 6 - Inside the Front Panel, Card Cage Picture 7 - Keypad Controls Picture 8 - Front Side of the Cassette Handlers Picture 9 - Back Side of the Cassette Handlers Picture 10 - Back of the Monitor, Panel Removed Picture 11 - Communication Interfaces & Reset Switch Picture 12 - Power Connection Picture 13 - Serial Number Tag $100.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination. If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. 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Condition	Used : An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes	“This unit powered up and passed it's self-test. I can not test it after that as I do not have a wafer or cassette to use. The start button key is a little loose. The unit is sold as-is! The unit has a stainless steel bench that is optionally included.”