Mirra 3400 Cmp

US $3697

  • 569510, Singapore
  • Nov 15th
GENERAL INFORMATION  TOOL ID:                      CMP09 Serial Number:             L285 Vintage:                       1999 OEM:                            Applied Material MODEL:                       MIRRA3400 Process:                       Stop On Nit Software Version:         MT59c4 CPU:                             Pentium III SECS:                           SECS II UPS:                             NO In-Situ Measurement (NOVA): Nova Scan 2040   WAFER SPECIFICATION: Wafer Size:      200mm Wafer Shape: SNNF (Semi Notch No Flat) SMIF Interface:   NO   CONFIGURATION: Loading Configuration:        4-Wet Stage Loaders Load Cup:                            Standard Temperature Control:           NO Head Type:                          Titan 1 Head#:                                 4-Head Slurry Supply:                      2-Line Platen:                                 3-Platen                 Platen1 Slurry POUs: Slurry / DIW                 Platen2 Slurry POUs: Slurry / DIW                 Platen3 Slurry POUs: Slurry / DIW Controller Unit:                   1 Unit BUYER TO ARRANGE SHIPPING (EX-WORKS: SINGAPORE)

Directions

Similar products from Tool & Machine Spare Parts

People who viewed this item also vieved

By clicking "Accept All Cookies", you agree to the storing of cookies on your device to enhance site navigation, analyze site usage, and assist in our marketing efforts.

Accept All Cookies