New Amat 3030-03717 / Mks 1479a-21950 Mfc Mass Flow Controller Applied Materials

US $790

Phoenix, Arizona, United States
Jun 4th

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NEW Applied Materials PN: 3030-03717 Mass Flow Controller made by MKS, Model: 1479A-21950 Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from MKS and may vary slightly due to upgrades, options, or revisions this unit may or may not have. These units are believed to be new, old stock. They are guaranteed to work. Calibration is probably needed. The Unit's Information Tag Reads: Model Number: 1479A-21950 Gas: N2 Range: 3000 SCCM AMAT Information: Part Number: 3030-03717 Description: MFC 1479 3SLM O2 1/4VCR MTL N/C 9PIN RS4 Link to the Datasheet: MKS 1479A Mass Flow Controller Datasheet Description: The MKS Type 1479 is an economical metal-sealed mass flow controller designed to measure and control the flow of gases in high purity applications. The type 1479 Mass-Flo Controller is available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. The 1479 can also be used as a pressure controller when connected to a suitable pressure transducer. The 1479 is a direct form-fit-function replacement for most common MFC's on the market today. The standard 3-inch footprint enables the 1479 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same PC card edge type of Type "D" connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1479 is compatible with MFC power supply and display electronics from MKS or other manufacturers. Specifications: Full Scale Ranges (N2 Equivalent): 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm Maximum Inlet Pressure: 150 psig Normal Operating Pressure Differential (with atmospheric pressure at the MFC outlet): 10 to 5000 sccm: 10 to 40 psid 10000 to 20000 sccm: 10 to 40 psid Control Range: 2% to 100% of F.S. Accuracy (including non-linearity, hysteresis, and non-repeatability reference to 760 mmHg and 0°C, Calibration Gas): Analog: ±1.0% of F.S. Digital: ±1.0% of Reading; 20-100% of F.S.. ±0.2% F.S., < 20% of F.S. Resolution: 0.1% of F.S. Temperature Coefficients: Zero: < 0.05% of F.S./°C Span: < 0.08% of Rdg./°C Warm-Up Time (to within 0.2% of F.S. of steady state performance): < or = to 2 min Controller Setting Time (per SEMI Guideline E17-91): < or = to 2 sec Pressure Coefficient: < 0.02% of Rdg./psi Normal Operating Temperature Range: 0°C to 50°C Input Voltage Required: Max. at Start-Up (First 5 sec): ±15 VDC (±5%) @ 200 mA Typical at Steady State: ±15 VDC (±5%) @ 100 mA Set Point Command Signal: 0 to 5 VDC from < 20K Ω Output Signal: 0 to 50 VDC into > 10K Ω Output Impedance: < 1 Ω Connector Types: Analog: 9-pin or 15-pin Type "D", 20-pin card edge (The 15-pin Type "D" and card edge connectors are electronically compatible with other MKS flow controllers.) Wetted Materials: Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)., 316 S.S., nickel Valve Seat: Kel-F for < or = to 200 sccm, Teflon for > or = to 500 sccm configurations Leak Integrity: External (scc/sec He): < 1 x 10-10 Through Closed Valve: < 1.0% of F.S. at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.) Fittings (Compatible with): Swagelok 4 VCR, 1/4" Swagelok, surface mount Electromagnetic Compatibility: Fully CE Compliant to EMC Directive 2004/108/EC when used with an overall metal braided shielded cable, properly grounded at both ends. For More Pictures Please Click the Following: Picture 2 - Back View Picture 3 - AMAT Part Number Tag For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $15.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. Also, please click here to view or other auctions! 09/27/11 Powered by eBay Turbo Lister The free listing tool. List your items fast and easy and manage your active items.