NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 0

NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 1

NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 2

NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 3

NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 4

NEW ENI 240L Solid State Broadband RF Power Amplifier 20 kHz-10 MHz, 50 dB, US $5,964.99 – Picture 5

New Eni 240l Solid State Broadband Rf Power Amplifier 20 Khz-10 Mhz, 50 Db

US $5,964.99

Phoenix, Arizona, United States
Jun 9th

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NEW MKS/ENI OEM-12AM/12A RF Plasma Generator made for Applied Materials Precision 5000 Chambers (AMAT PN: 0240-09772) Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from ENI and for a OEM-12AM (not 12A) and may vary slightly due to upgrades, options, or revisions this unit may or may not have. The manual with the RF Generator said it was a OEM-12AM but the unit itself says OEM-12A-21041-51. The paperwork with it says it was for an Applied Materials Precision 5000-0004 Etch Chamber and it can be used on A, B, C, or D Chambers. The unit is brand new and was originally in an AMAT box but the box fell apart. It is guaranteed to work. The Unit's Serial Number Tag Reads: Model Number: OEM-12A-21041-51 Serial Number: 5610 SB225 Date: 01/26/96 Revision: G The AMAT Informational Tag Reads: Part Number: 0240-09772 Description: WPIK 1200 Watt RF Generator For: Precision 5000-0004 Introduction: The ENI Model OEM-12AM Power Generator is totally solid state. This generator is a water cooled power source expressly designed for use in gas plasma plasma and sputtering applications. Completely self-contained, the OEM-12AM provides all of the control and monitoring functions needed in a state-of-the-art power generator. It will provide a maximum continuous power output of 1250 W into a 50 Ohm impedance. The OEM-12AM is provided with an extremely well shielded and filtered power supply virtually eliminating conducted line leakage. An extremely sharp low pass filter at the output of the unit ensures that all harmonics are reduced to very low levels. Extensive use of shielding and RF suppression techniques permit the unit to more than meet FCC requirements for ISM equipment at the same time that it eliminates any susceptibility problems for associated plasma system circuitry. The reliable operation of any solid-state power generator is directly influenced by the sophistication of its power control circuitry. The unit's automatic power control module measures forward RF power, reflected RF power, and the current draw of each RF power amplifier module. Should any of these parameters exceed a preset limit, the automatic power control will immediately fold back its RF output power so that the components always remain within their safe operating limits. Besides assuring safe operation of the OEM-12AM the automatic power control module will provide constant RF power output level to within 0.5% of rated power plus 1.5% of the matched power setting up to 3:1 VSWR. Additionally, the automatic power control eliminates power output drift due to the line voltage variations, component aging and reduces output hum and ripple to insignificant levels. An external DC Voltage or pulse fed into the rear panel connector will permit the power output of the OEM-12AM to be accurately controlled by a computer program that includes end-point detection information. The OEM-12AM is provided with an input/output connector that provides access to all control and metering functions which include: Unit AC Power -- On/Off Interlock RF Power -- On/Off RF Power Control -- 0 to 1250 W Maximum Power -- Max. Power/Normal Overheat -- Overheat/Normal Power Output Indication -- Variable Gain. Specifications: Frequency: 13.56 MHz Frequency Stability: ±0.005% Maximum RF Output Impedance: 50 Ohms RF Output Connector: Type N Power Line: Power supply taps provided for 190/208/220/240 VAC ±5%, single phase 50-60 Hz at 18 A or less at full power output. Factory set for 208VAC operation. RF Power Control: Automatically forward power leveled, front panel or external control switch selectable. Maximum Power Output: 1200 W at end of 55' of RG217. Local control set to 1315 W maximum. Remote control set to 1315 W maximum. Harmonic Distortion: All harmonics are more than 55 dB below the fundamental. Line Related Noise: Noise hum and ripple more than 30 dB down at maximum power output. AC Line-to-Power Regulation: 0.50% maximum change in output power for 7.5% change in AC line voltage. Power Output Meter: 0 to 1400 W with an accuracy of 4% of full scale. Forward and reverse power by switch selectable. Automatic Forward Power Leveling: 5W to maximum power output operating into 50 Ohms load: internally or externally controlled. Power Foldback Protection: Automatic; occurs when reverse power reaches 300 W or power amplifier current exceeds preset limit. Pulsed Operation: Rise time is less than 0.5 msec; RF output may be controlled simultaneously for amplitude and pulse width. Power Control Accuracy: Variation in output power within 0.5% of rated power plus 1.5% of command power, reference to ENI RF Power Standard. Load variations from 1:1 VSWR to 3:1 VSWR (within foldback limits). Load Mismatch Tolerance: The unit will operate continuously into any load mismatch without oscillation or failure. Cabinet and Spurious Radiation: Below FCC specifications. External I/O Interface: 'D' subminiature RFI suppression (customer-specified adapter cable supplied). OEM-12AM-H-50. External RF On/Off Control: +20 V to 24 VDC to enable RF power (floating, not ground referenced). Forward RF Power Control (Remote): Factory set for 125 W.V. 10 V=1250 W. Forward RF Power Indicator: Reading from 3W to 1250W. Accuracy within ±(0.5% of 1250W = 1.5% of set power). 125 W/V, 1250 W=10 VDC. Reverse RF Power Indicator: Reading from 5W to 300W. Accuracy within ±(2% of 300W +2% of reading). 30 W/V, 300 W=10 VDC. Maximum RF Power Indicator: Front panel-mounted LED RF Power on Signal: +5 V at 10 mA signal. RF Power on Indicator: Front panel-mounted LED. Cooling: Water flow at 1.2 gallons per minute minimum. Cooling water inlet and outlet are 1/4" female NPT. Maximum Water Inlet Temperature: +5°C to 35°C max. Maximum Water Pressure: 70 psi. Size: 8 3/4" W x 17" W x 15 3/4" D (22.2 x 43.2 x 40 cm) Weight: 126 lbs. (57 kg.) - does not include packaging for shipment. Rack Mounting: 19 inch rack-mounting ears supplied. For More Pictures Please Click the Following: Picture 2 - Front View Picture 3 - Front Panel, Up-Close Picture 4 - Back View Picture 5 - Serial Number Tag $100.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination. If you have any questions please email us at: ebay@mhzelectronics.com or call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. 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“This unit ships tested and guaranteed to work for 30-days, parts and labor, excluding freight. This unit is new, old stock. It has the original ENI box with it. The unit does have scratches and knicks from being moved around in storage, etc.”