Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 0

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 1

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 2

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 3

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 4

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 5

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 6

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 7

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 8

Novellus C1 200mm, Concept one 8 inch, SiO/SiN/TEOS ,, US $88,000.00 – Picture 9

Novellus C1 200mm, Concept One 8 Inch, Sio/sin/teos ,

US $88,000.00

Worldwide, Korea, South
Mar 4th

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NOVELLUS CONCEPT ONE 8 INCH SPECIFICATIONS MAKER : NOVELLUS MODEL : CONCEPT ONE 200mm Condition : Used, As-Is Description Novellus Concept one 8" Configuration Sheet Maker : Novellus Systems Date of Inspection : February 25, 2015 Model / Serial No : Novellus C1 8" / 95-43-1093 Inspector : Youngbay Yoo Process : SiO/SiN/TEOS Supplier : SYSTA Co.,LTD WAFER Size : 8" (200mm) 1.0 GAS SYSTEM No Section 200mm Standard Options SYSTA Tool Remark 1.1 TEOS Liquid Delivery System: Sigma 6, Doped / UnDoped Sigma 6 Undoped 1.2 TEOS LFC Module: Doped / Undoped Undoped 1.3 TEOS Delivery Cabinet: Yes/No Yes Sigma6 Manual Type 1.4 Process Gas Panel: 11-Channel 11-Channel 1.5 MFC Type: AERA / Brooks / STEC / UNIT Stec 1.6 MFC Layout Position / Orientation / Connector VID 1.6a A1 Vertical / Card Edge 5slm / N2 1.6b A2 Vertical / Card Edge 1slm / SiH4 1.6c A3 Vertical / Card Edge 2slm / PH3 1.6d A4 Vertical / Card Edge 2slm / B2H6 1.6e A5 Vertical / Card Edge 5slm / N2 1.6f Purge Vertical / Card Edge 5slm / N2 1.6g B1 Vertical / Card Edge 10slm / N2 1.6h B2 Vertical / Card Edge 20slm / N2O 1.6i B3 Horizontal / Card Edge 5slm / C2F6 1.6j B4 Vertical / Card Edge 20slm / O2 1.6k B5 Horizontal / Card Edge 2slm / C2F6 1.6l B6 Vertical / Card Edge 20slm / NH3 2.0 VACUUM SYSTEM 2.1 Pneumatic Panel: Classic / New Generation New Gen 2.2 Microcontamination Package: Yes / No Yes 2.3 Purge Panel: Standard / Soft Start Soft Start 2.4 Loadlock Foreline: With Throttle Valve / Without Throttle Valve With Throttle Valve 2.5 Reactor Foreline: External Heated / Internal Cold External Heated 2.6 Pumps Main Chamber Blower: No 2.7 Load Lock Pump: No 3.0 TOP PLATE/PROCESS CHAMBER 3.1 Gas Distribution: Teflon / Ceramic Ceramic 3.2 Chamber Ring Assembly: Etch Resistant Quartz / Sapphire Sapphire 3.3 RF Match Network: Trazar Trazar AMU2-1 4.0 BOTTOM PLATE 4.1 RF Isolated TC: Yes / No Yes 4.2 RF Shunt: Yes / No Yes 4.3 RF Strap / Feed Through: New Style / Old Style Old Style 4.4 Heater Block: Notched / Pinned-Station 1 / Pinned-All Notched 5.0 WAFER SPINDLE ASSEMBLY 5.1 Spindle Fork Assembly: Ceramic Full Contact / Ceramic Minimum Contact Ceramic-Minimum Contact 5.2 Spindle Seal T-Seal / Ferrofluidic T-Seal 6.0 LOADLOCK CHAMBER 6.1 Loadlock Cassette Door: Windows Yes Windows Yes 6.2 Wafer On Paddle Sensor: Standard / Visible Red / None Standard 6.3 Wafer Cooling Station: Yes / No Yes 6.4 Platform: Non-Contact Pin Search / Contact Non-Contact Pin Search 6.5 Platform-Type: Standard / Extended Extended 7.0 WAFER TRANSFER 7.1 Robot: 90V - Standard / 70V - Upgrade 90V 8.0 ELECTRICAL 8.1 Main AC Panel: Classic / New Generation Classic 8.2 Remote AC Panel: Classic / New Generation / Advance Control Pump Advance Control Pump 8.3 Power Supply: Quad 24V / MEGA Pak Quad 24V 8.4 AC Box Pump Wire Configuration: Ebara (ACP) / Edwards Q N/A 8.5 AC Box Load Lock Wire Configuration: N/A 8.6 CE Mark: No 9.0 CONTROL SYSTEMS 9.1 Instrument Panel: Valve Display Controller Tylan ACD-28 9.2 Instrument Panel: Temperature Controller Eurotherm 9.3 Instrument Panel: Excess Temperature Interlock MeterMaster 9.4 Instrument Panel: Reactor Pressure Controller Tylan AC-2 9.5 Instrument Panel: Load Lock Pressure Controller MKS 652 9.6 Instrument Panel: Throttle Valve Heater Controller Tylan HPC-120 9.7 Touch Screen System: ELO Disabled 9.8 Maintenance Monitor: Flat VGA Flat VGA 9.9 Computer: Pentium 486 9.10 Software: Latest Released Revision N/A 9.11 Disk Drive: 1.44 (External) Yes 9.12 SECS/GEM Interace Software: Standard on 4.433 N/A 9.13 Multibus Controller Configuration: 9.13.a Multibus: CPU - Slot 2 Standard / TEOS Option TEOS Option 9.13.b Multibus: Digital I/O - Slot 5 Yes / No Yes 9.13.c Multibus: Analog Output #2 - Slot 8 Yes / No Yes 9.14 Terminal Panel: New Generation 02-024778-00 (Rev A) 9.15 End Point Detection: Single / Dual / N/A N/A 10.0 RF GENERATORS 10.1 High Frequency RF Generator: ENI / AE (Model#) OEM 50 10.2 Low Frequency RF Generator: ENI / AE (Model#) OEM PL2HF 10.3 Dual Frequency Option: Yes / No Yes 10.4 Remote Signal Cable (CA99): Cable Length 03-00267-03 10.5 HF RF Coax (CA57 / CA140): Cable Length - 12' / 36' / 60' / 84' 03-00125-02 10.6 LF RF Coax (CA102): Cable Length - 12' / 36' / 60' / 84' 03-00313-03 10.7 HF Signal Cable (CA96): Cable Length - 20' / 45' 03-00143-01 10.8 LF Signal Cable (CA100): Cable Length - 20' / 45' 03-00075-02 11.0 SKINS/COVERS 11.1 Skins: Rear Panel Option Yes / No Yes 11.2 Skins: End Point Computer Cover Yes / No No 11.3 Skins: Foreline Cover Yes / No N/A PAYMENT TERMS Payment can be made with PayPal & Wire Transfer Our PayPal Account : judy@systa.kr SHIPMENTS We are able to ship your product to world wild. Shipping condition are based on Ex-Works from SYSTA's warehouse. We will ship your order within 2-3 business days with FedEx international Economy. It will usually take 5-7 business days for you to get your order after shipment. If you prefer other shipping company( UPS, EMS, DHL etc.. ), please let us know your account No and the company. CONTACT US Business Hours : 9 AM to 5:30 PM (UTC+9) Monday to Friday Closed on weekends and public holidays Address : SYSTA Co., Ltd 569-2 Oesammi-dong, Osan-si, Gyeonggi-do, South Korea ( 447-230 ) Phone : +82-31-377-7520 / Fax : +82-31-377-7521 E-Mail : sales@systa.kr / Website : www.systa.kr

“Condition : Used, As-Is and SYSTA's ware house Ex-works”

Brand	NOVELLUS
Country/Region of Manufacture	United States
Model	CONCEPT ONE