Refurbed Advanced Energy Hfv-8000 Rf Generator 8kw Amat Pn: 0190-15553 208 V 3ph

US $7,499.99

  • Phoenix, Arizona, United States
  • Jan 30th
Click Here. Double your traffic. Get Vendio Gallery - Now FREE! Refurbished Advanced Energy HFV-8000 Variable Frequency RF Generator, Applied Materials Part Number: 0190-15553 Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Advanced Energy and may vary slightly due to upgrades, options, or revisions this unit may or may not have. Multiple units available, only 1 sold in the auction. These units were refurbished by Advanced Energy and look to be in new/pristine condition. They are guaranteed to be in working condition. The Unit's Serial Number Tag Reads: Model Number: HFV 8000 Part Number: 3155083-192 AMAT Part Number: 0190-15553 Revision: B Firmware Revision: A Serial Number: 261442 Specification: 8 kW, 1.765 - 2.165 MHz, 640 V, Semi F47 Compliant Input Power: ~3 Wire + PE, 208 V, 50/60 Hz, 11 kW CE Marked: Yes Description: The HFV generator is an 8-kilowatt, high-efficiency, 1.765-megahertz to 2.165-megahertz generator intended for continuous, heavy use in a vacuum chamber environment. The generator employs Advanced Energy's patented RF circuit topology in a compact, rack-mountable, enclosure. Designed to regulate on forward power or load (delivered) power into a broad range of output impedances, the HFV generator can operate in center frequency mode or in automatic tuning mode. Direct digital synthesis (DDS) continually adjusts the operating frequency in order to minimize the reflected power for a given load impedance. Both center frequency and automatic tuning modes support operating into a fixed impedance matching network, which simplifies system complexity, increases reliability, and improves process-to-process repeatability. Automatic tuning mode continuously minimizes the mismatch to the generator. This mode is available while in forward power regulation mode. In load power regulation, an itial frequency sweep is performed to determine the frequency that yields the minimum reflected power. You can control the HFV generator through a 15-pin, custom analog Generator User port or through a DeviceNet interface. DeviceNet is an electrically isolated interface installed with either a 5-pin, 12-millimeter "Micro" Lumberg RSF 5/0.5 or Turck FS 4.5 series connector. This interface supports the DeviceNet Group 2 I/O Poll Command message and Group 1 I/O Poll Response message for data transfer. You may configure MAC ID and baud rate settings through rotary switches, or you may program a DeviceNet master. Module Status and Network Status indicators are provided in accordance with the DeviceNet specification, in addition to isolated Module Status and Network Status drive signals on the 15-pin Generator User port for remote indicators. In addition, Advanced Energy has a Virtual Front Panel (VFP) software available for purchase. With VFP software, you can control most generator functions and monitor the HFV generator using a personal computer. The front panel features a liquid crystal display (LCD) mode selector and five status indicators. The HFV generator also has an internal diagnostics program to help determine generator integrity. The front panel is primarily for monitoring the operation of the generator or initiating the internal diagnostics program. The HFV generator is designed to fit into a 48-centimeter (19") rack with a panel height of 13 centimeters (5.25") (3U). The generator operates from a 208 VAC, 3 Phase, 50/60 Hz power source and can tolerate arbitrary phase rotation of the input power connections. The HFV generator is water-cooled with all power, interface-port, and water connections at the rear of the generator. Functional Specifications: Output Regulation Modes: The HFV generator provides forward power and load (delivered) power regulation modes, as measured at the RF output. Interface Configurations: The HFV generator has a 15-pin analog Generator User port for generator control. In addition, it has a 5-pin DeviceNet interface. A 9-pin serial Host port (RS-232, RS-422, and RS-485 compatible) is available for preselecting the frequency or frequency tuning algorithm. Host Port Control Features: The Host port controls the frequency and frequency tuning algorithm, along with other control features. DeviceNet Control Features: The DeviceNet interface allows you to set a power set point and enable/disable the output. Read back values are provided for forward regulation, reflected power, and various status bits. RF Output Operating Conidtions: To achieve the RF output, ensure the following conditions are met: External interlock loop closed (less than 15 Ω in series path) RF output cover firmly attached Front panel Standby switch in the Standby (up) position No faults present (Front Panel Fault indicator should be off) No chamber arcing present Set point signal > 220 mV (Generator User Port) Set point signal > 180 W (DeviceNet) RF Enable command present Cooling: The HFV generator is water-cooled to allow operation in a clean room environment. The HFV generator will not reduce performance when the inlet water temperature is +15°C to +30°C (59°F to 86°F) and the flow rate is 11.4 lpm (3 gpm) or greater. All supplied water connections should be 9.53 mm (3/8") ID or larger water lines. Keep the incoming and outgoing water lines as short as possible and the outlet back-pressure minimized. Physical Specifications: Size: 13.3 cm H x 43.2 cm W x 51.4 cm D (5.25" x 17.0" x 20.25"), 19" rack mount ears, Allow 10.16 cm (4.0") additional depth for line cord service loop, Allow 3.81 cm (1.50") additional depth for the RF output cover, Allow 11.94 cm (4.7") additional depth for the optional water solenoid. Weight: 34 kg. (75 lbs.) Connector/Cable:   RF Output: SQS female connector. (RF Output cable not provided; RG-393 or equivalent recommended)   AC Input Power: 4-wire cord, 10 mm (8 AWG), 60 cm (2') long with Hubbell connector (CS8365C)   Generator User Port: 15-pin, shielded, female, subminiature-D   Host Port: 9-pin, shielded, female, subminiature-D   DeviceNet Port: Either a 5-pin, 12 mm "Micro" Lumberg RSF 5/0.5 or Turck FS 4.5 series connector   Coolant: 3/8" stainless steel, female NPT Electrical Specifications: Input Power:   Line Voltage: 208 V, 3 Phase with Ground; no neutral connection required   Line Frequency: 50/60 Hz   Line Current: 34.5 A at 176 VAC, 29.5 A at 208 VAC (During F47 line sag events, the line currents can exceed the circuit breaker rating but will not trip the breaker)   Power: 11 kW maximum (at full rated RF output power)   Overcurrent Protection: 40 A circuit breaker RF Output Specifications:   Output Power: Scaled for 8000 W maximum with operator-selectable set point. RF is off when set point falls below 180 mV; RF is on when setpoint rises above 220 mV   Reflected Power: Reflected power is limited internally to 1000 W   Regulation: Across full frequency range into 50 Ω load: Forward power regulation mode is ±3.0% of set point or ±24 W (whichever is greater) Load power regulation mode is ±4.0% of set point or ±32 W (whichever is greater) Display accuracy is ±2.0% of set point (regulated) or ±16 W (whichever is greater)   Transient Regulation: < or = to 0.1% change for a 10% disturbance in the AC line voltage   Frequency: 1.765 to 2.165 MHz, center or automatic, selectable through the 9-pin Host port or front panel LCD and display mode switch   Response Time: < or = to 100 ms rise (at full scale point) and fall time from RF On or RF Off   Load Impedance: 50 Ω, ±2 Ω center impedance   Harmonics: At full rated output, all harmonics are 21 dB below the RF output signal when operated into a 50 Ω, nonreactive load impedance. All spurious (nonharmonic) outputs are 30 dB below the RF output signal.   AC Line Sag Response: The HFV generator is compliant with the SEMI F47-0200 guidelines for voltage sag immunity; the power regulation folds back during a voltage event, then self-recovers. For More Pictures Please Click the Following: Picture 2 - Back View Picture 3 - Front Panel Controls, Up-Close Picture 4 - RF Output Connector Picture 5 - Generator User Connection Picture 6 - Water Solenoid Connection Picture 7 - DeviceNet Connection & Controls Picture 8 - Water Input/Output Connections Picture 9 - Specification Tag Picture 10 - Serial Number Tag For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $50.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? For all international customers, the following terms and conditions shall apply: These commodities, technology, or software are to be exported from the United States in accordance with Export Administration Regulations. Diversion contrary to U.S. law is prohibited. Domestic customers must also agree to the following terms and conditions: For items shipped within the United States, MHz Electronics, Inc's performance shall occur entirely within the United States. Unless expressly agreed to by MHz Electronics, this shall not be a routed party transaction. If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. 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Condition Manufacturer refurbished :
An item that has been professionally restored to working order by a manufacturer or manufacturer-approved vendor. This means the product has been inspected, cleaned, and repaired to meet manufacturer specifications and is in excellent condition. This item may or may not be in the original packaging. See the seller’s listing for full details.
Seller Notes These units were refurbished by Advanced Energy and look to be in new/pristine condition. They are guaranteed to be in working condition.

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