Roth & Rau SiNA PECVD Silicon Nitride, US $339,999.00 – Picture 0

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Roth & Rau Sina Pecvd Silicon Nitride

US $339,999.00

Boerne, Texas, United States
Jan 30th

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56813 One (1) SINA, a modular in-line system manufactured by Roth and Rau for deposition of silicon nitride, or similar silicon based layer, on wafers (flat substrates) by a continuous PECVD process. The former application was for anti-reflection coating for solar cells. The systems consists of 5 chambers, or modules, for load-lock; heating; deposition; cooling off; load-lock and includes carriers for wafers through the system. Technical Data: Dimensions: Frame (LXWXH) 6000 x 1800 x 1600 Installation Cabinets 2400 x 600 x 2000 Control Rack 800 x 600 x 2000 Weight: 8000KG Electrical: Power 160KW Voltage 400V +/- 5%, 3 phase, 60 HZ Voltage of Comp. 220V~, 24V~, 24V= Pnuematics: Compressed air: 5-7 bar oil free connections: Festo 10mm Process Gas Distribution: Central connection of gas pipes: VCR4 Cooling Water: Pressure 4-6 bars Outlet pressureless against atmosphere inlet temperature max 20*C water flow max. 4000 l/h connectors 1 1/4" pins Exhaust Connector DN 63 ISO-K In its standard version the system consists of five modules: Chamber 1 - load lock chamber (load) Chamber 2 - heating chamber Chamber 3 - deposition chamber Chamber 4 - cooling of chamber Chamber 5 - load-lock chamber (unload) All chambers are mounted on separate stainless steel racks Deinstalled and warehoused in Temple, TX, USA Additional details: PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H Approximate capacity of 1,200 156mm x 156mm wafers per hour each. General Info: · Located in USA · Operational until taken out of service in 2012 Specifications: · Manufacturer: Roth & Rau Model - SiNa Plus · Megawatt production: 30MW · Material: Poly Silicon (Multi Crystalline Silicon) · Process: Ammonia & Silane Gas · Wafer Size: 125mm and/or 156mm Square · Ammonia gas panel and Ammonia fume scrubber · Lines are complete with: · Loader, Unloader, conveyor, changer and process unit. Other info: Roth & Rau Silicon Nitride Line: Roth & Rau SiNA Plus Lot: PECVD line Silicon Nitride-SIN 1: 41'L x 8.2'W x 6.9'H; 480V AC; 3ph; Current 400A; Line Frequency 60 Hz; with (3) BOC Edwards GV 600 vacuum pumps(NOT INCLUDED) (3) EH4200 Mechanical Booster pumps NOT INCLUDED). Pneumatic Supply 500L/m; with Weight 22000kg; Operation and Maintenance Manual. Includes (1) ATS # 1815, SiN 1 Loader w/ Allen-Bradley PanelView 600 controller. 19'L x 11'W x 7'H; 480V AC; 3ph; Cur-rent 30A; Line Frequency 60Hz; Operation Manual included (2005). Mfg Yr: 2005. Location: USA

Condition:	Used: An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections. ...	Capacity	125mm and/or 156mm Square
Item located at	Texas
Size	1,200 156mm x 156mm wafers per hour
Terms & Conditions	As is where is
Manufacturer	ROTH & RAU