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SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 0
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 1
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 2
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 3
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 4
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 5
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 6
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 0
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 1
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 2
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 3
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 4
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 5
SPTS High Rate Deep Silicon ICP Etcher, US $139,000.00 – Picture 6

Spts High Rate Deep Silicon Icp Etcher

US $139,000.00

  • Vincentown, New Jersey, United States
  • Mar 25th
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Title:   SPTS High Rate Deep Silicon ICP Etcher  Description: SPTS / STS DRIE (Deep Reactive Ion Etch) system Year of manufacture: 2003 Serial Number: 32343 Advanced Silicon Etch (ASE) with Bosch process HR Chamber for High Rate Etch Set up for 200mm wafer (100mm-200mm capable) MACs Loader for Cassette to Cassette operation (2 load stations) Load Lock Pump: iQDP80 Chamber Pump: iQDP40-QMB250 Chiller: Tektemp TKD200/5118TL Removed from operation in 2014 at a MEMs fab. As-is. no warranty  or guarantee Refurbished system is available for purchase from GCE Market.  See the following link: http://gcemarket.com/gce/gce.nsf/products/spts-ase-hr-icp-drie-9aar7y    Sold : As-Is-Where-Is , No Warranties Expressed Or Implied.
Condition:
Used: An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections. ...
Brand SPTS
MPN Serial Number 32343
Model STS DRIE (Deep Reactive Ion Etch) System

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