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STS Multiplex PECVD System / Mint - Demo Condition - Nitride Config - Warranty, US $14000 – Picture 0
STS Multiplex PECVD System / Mint - Demo Condition - Nitride Config - Warranty, US $14000 – Picture 0

Sts Multiplex Pecvd System / Mint - Demo Condition - Nitride Config - Warranty

US $14000

  • Palisades Park, New Jersey, United States
  • Jun 9th
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  Please contact us through ebay mail, or directly by  phone: (201) 592-1864  or by email:  nrscientific@gmail.com Additional photos and information available on request. Immediate availability.  Immediate Shipment possible. Contact  us for warranty terms / conditions. Also available with installation at additional cost. Mint Condition STS Multiplex PECVD System Also available in as-is  condition at lower pricing. Demo Condition.  Installed, qualified, run for pilot production , then mothballed. Set up for Nitride PECVD.  Can be reconfigured for other processes. 12 Channel Gas Cabinet - 8 gases, 3 N2 Purge, 1 Vent Optional Carousel Loading Option. Load Locked Chamber Current SPTS system replacement cost about $1,000,000.   a.    Serial number 09041 b.    Load locked chamber with Carousel loading option. Complete with loader computer and software.  Set up for 6" substrates.  Capable of wafers and substrates up to 8". c.    Electronics Control Rack, including system computer and software. d.    RF Power control rack, including Advanced Energy LF5 power supply. e.    Gas Control Cabinet, including 12 channels.  8 gases, 3 N2 purge and 1 Vent.  f.     Edwards IQDP 80 Dry pump with EMB500 Blower/ pumping stack for main chamber. g.    Edwards E2M40 pump for load lock. h.    All cabling and vacuum plumbing, as seen in photos will be supplied. i.     System is viewable at our NYC area facility for inspection and acceptance prior to shipment. j.     System sold as-is, per inspection and on-site acceptance.   Please contact us for full system details,  warranty terms and conditions, options for selling, export, etc. For your reference, the seller is N&R Scientific Co. We have been providing high quality equipment to customers worldwide for very many years. Our facility is located in the metropolitan NYC area. Please note:  for purchases of this size, we are unable to accept credit cards or  PayPal unless special arrangements are made.  Kindly contact us regarding suitable payment arrangements.

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