Svg Series 90 Coater / Developer Track

US $17639

Kanot Industrial Park 7982500, Israel
May 30th

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SVG Series 90 Coater / Developer Track Shipping: · Please note International Buyers: All customs duties and clearing and any other duty taxes are not included in the price and should be borne by the buyer. · Shipping methods are flexible. · The buyer may choose to use his preferred shipping method. · Buyer may choose to use his own forwarder and not pay for shipping to us. Sale Terms: · The pictures that you see are the real pictures of one the item, i.e., “what you see is what you get”. No other parts are included with the item. Condition: · The item looks in good condition. · The item is used untested surplus equipment. · Buyer may ask for additional photos and information. · We don’t have testing capabilities and therefore we sell the pumps “AS-IS”. Handling, Crating and shipment: · We provide a few methods of packaging / crating as per the buyer requests. · Shipping method also to be discussed and agreed by the buyer. · Specifications: SVG Series 90 Coater/Developer Track · Manufacturer SVG · Model 90 C4 Coater/Developer Track · Wafer Size: 200mm, notched · Twelve (12) stations, interfaced · Seven (7) serial arms · Facilities location is through the floor · Floor is solid SS spill containment w/ overflow sensors · Control Module integrated on end station · MCE on IES · SECS I/II interface · Power Requirements 208 volts, 3-phase, star, 60 Hz · Coater and developer direct floor drains with exhausted drain box · IRS rotators and platforms · One (1) Coater · Photoresist Temperature Control · Air Temp / Humidity Control · Two (2) FAS / Millipore model 250 pumps w/ programming pendant · 100cc TEBR Millipore unfiltered pump · Two (2) 100cc BEBR Millipore unfiltered pumps · One (1) 25cc Millipore unfiltered WCDS pump and controller for Track Adhesion Promoter · SVG - 25cc Millipore unfiltered pump · Dispense line OD (nozzle tip = 3/8” for Lines # 1.2; = 1/8” for Line # 3) · SVG Pumps and controllers · One (1) SS non-coated 3 gallon un-pressurized vessel with 4 liquid level sensors · Two (2) Developers · Air Temp / Humidity controller · High flow (2 stream) nozzles and dual chemistry developer fluid dispensing system · Two (2) Stainless Steel Tefzel coated, 3 gallon pressurized canisters with 4 liquid level sensors · 0-60 psi canister gauges · Degasifier on Develop lines · Five (5) Vacuum Bake Ovens · One (1) Vapor Prime Oven · One (1) chill Plates