Veeco Fpp-5000 4-point Probe (four/fpp5000) Wafer

US $4,999.99

  • Phoenix, Arizona, United States
  • Jan 30th
Click Here. Double your traffic. Get Vendio Gallery - Now FREE! Veeco FPP-5000 4-Point Probe Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Veeco and may vary slightly due to upgrades, options or revisions this unit may or may not have. Various heads can be supplied upon request. The unit will be fully checked out before shipment. It is guaranteed and verified to work. The Serial Tag Reads: Model Number: FPP5000 Serial Number: 632C Wafer Size Inscribed on it: 100, 125, 150 mm. 2,3 In Link to the Specifications: Veeco FPP-5000 Four Point Probe Specifications Description: The FPP-5000 4-Point Probe simplifies the measurement of resistive properties of semiconductor wafers and resistive films. The microprocessor based electronics permits direct computation of V/I, sheet or slice resistivity, metalization thickness and P-N type testing. The electronics and probing mechanism is contained in a single compact package. The rugged cast aluminum housing assures mechanical integrity of the probe mechanism. The probing mechanism features a constant force probe head which is rigidly fixed in the housing. Unlike most four point probes and probing stations, which move the probe head into the wafer, the FPP-5000 is designed so that the wafer is moved into the probe head. This insures constant probe force independent of operator force and wafer thickness. An indexing wafer holder allows repeatable probe positioning. Plug in probe heads simplify the changing of probe heads. Electromagnetic interference on high resistivity materials is minimized by an integral cover which is electrically grounded to the chassis. A measurement is automatically made each time the wafer is lowered onto the probe tips. Additional measurements can be made without lifting the cover by depressing the RETEST button. A normal (or forward) and reverse current measurement is made each time a measurement is made. This results in an automatic indication, through an error code, if the probe head is out of adjustment or is excessively worn. Questionable or invalid tests are also indicated by error code displays. The input amplifier is automatically calibrated for each measurement insuring an accuracy of ± 0.5% from 5.0 milliohm to 5k ohm. The test current is continuously variable to minimize test current and maximize signal level. The slice or layer thickness necessary to compute the slice resistivity is entered via keyboard switches in microns, mils or Angstroms. The thickness of the layer is entered. The FPP-5000 also can compute the sheet resistivity, compensated for probe tip variations and edge effects for thin semiconductor layers, particularly those formed during ion implantation. The FPP-5000 automatically performs a semiconductor type test if selected. First a rectification test is performed followed by a thermal type test if necessary. If the results are inconclusive the N and P indicators are simultaneously displayed. If desired, the unit will supply a short low-energy, high-voltage pulse to the probe tips in order to penetrate any thin insulating layer on the sample. Both penetration and typing tests are performed, if activated by front panel switches. However, the penetration tests can be disabled internally (or externally) if inadvertent application would be detrimental to the substrate under test. Features: Compact integral probe and display Microprocessor based electronics Automatic ranging Four selectable displays Sheet Resistivity V/I Bulk resistivity of a slice with a known thickness Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity Keyboard Programming of slice or layer thickness or bulk resistivity Automatically performs a reverse and forward measurement each time the cover is closed RETEST button allows additional measurements without disturbing the probes Automatically holds teh last reading after the probe is released and until the next measurement is made Error code displays indicate improper operation, readings and electronics Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm. No more than ±8.0% at the extreme limits of the range Self test circuitry built in to determine if a fault is present Self calibration and zero circuitry assures high accuracy in all but extreme ranges Index substrate holder allows repeatable probe positioning on the substrate Probe up permits repeatable measurements independent of operator force and substrate thickness Integral RFI and light shielding for high resisitivity measurements Plug in probe head adaptors make probe head changing convenient and non critical Typing mode determines N and P typing for most semiconductor substrates or layers Penetration permits high energy pulse to be applied for the purpose of breaking through thin oxide layers Penetrate function can be disabled by means of internal switches Automatic calculation of correction factors to compensate for probe tip spacing variations Back lit front panel units indicators indicate only the units applicable for the mode of operation chosen. Electrical Specifications: The FPP-5000 requires an input power of 115/230 VAC ± 10%, 50/60 Hz, at approximately 30 watts. Geometric Correction Range: Based on the 2 configuration technique. Displays if calculated geometric correction is between 4.18 and 4.82. Calculated values above and below results in a flashing display in display SHEET, SLICE, and THICK. If as a result of the calculation, the intermediate results are negative, the display will indicate E 07. RS-232C Interface: Output on 25 pin female subminiature "D" connector.   Selectable Baud Rate: 9600, 4800, 2400, 1200, 300, 150 Electrical Specifications: Parameter Min Typ Max Units Current source compliance voltage at a test current of 500 mA -45     Volts Current source minimum current   250   nA Current source maximum current   500   mA Voltage Detector Impedance   1012   OHMS V/I Range for GEOM Correction 1.0 0.25 x 10-3   99.9 x 103 OHMS Metallization Thickness Range for RSLICE = 2.68 x 10-6 ohm cm (99.9% Pure aluminum)     2.43 x 10-5 A Sheet Resistance Range For GEOM Correction = 1.0 1.1 x 10-3   4.50 x 105 QHMS/SQ Slice Resistance Range for a 15 MIL Thick Substrate 4.1 x 10-5   1.71 x 103 OHM-CM Ambient Temperature that the unit will operate between 15°C 35°C Centigrade Electronic Accuracy independent of probe errors between an ambient Temperature of 15°C and 35°C at a relative Humidity of 50% and within the V/I range of 5.0 x 10-3 ohm and 5.0 x 103 ohm ± .05% Electronic Accuracy at the extreme ends of the V/I measurement range at an ambient temperature of up to 35°C ± 8% Rectification Type Test Voltage @ 240 KHz 10 VP-P Thermal Type Test Voltage @ 60 Hz at Source impedance of  10 ohm- 12.7 VRMS Penetrate Voltage 196 VDC Penetrate Duration 4 MSEC Penetrate Source Impedance 9.95     Megohms Test Voltages and Currents: R unknown Test Voltages Between Probe Pins 2 & 3 Test Current From Probe Pin 1 to 4 2.5 x 10-4 To 5 x 10-3 1.25 x 10-4 To 2.5 x 10-3 Volts 500 mA 5 x 10-3 To 5 x 10-2 2.5 x 10-3 Volts 500 to 50 mA 5 x 10-2 To 5 x 10-1 25 x 10-3 Volts 500 to 50 mA 5 x 10-1 To 5 x 10-0 2.5 x 10-3 Volts 5 to 0.5 mA 5 x 100 To 5 x 101 25 x 10-3 Volts 5 to 0.5 uA 5 x 10 To 5 x 102 2.5 x 10-3 Volts 50 to 5 uA 5 x 102 To 5 x 103 25 x 10-3 Volts 50 to 5 uA 5 x 103 To 5 x 105 25 x 10-3 Volts 5 to 0.25 uA For More Pictures Please Click the Following: Picture 2 - Front View Picture 3 - Back View Picture 4 - Left View Picture 5 - Sample Area Picture 6 - Four Point Probe, Up-Close Picture 7 - Serial Number Tag For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $50.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. Also, please click here to view or other auctions! 02/28/08 Powered by eBay Turbo Lister The free listing tool. List your items fast and easy and manage your active items.
Condition Seller refurbished :
An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details.
Seller Notes Various heads can be supplied upon request. The unit will be fully checked out before shipment. It is guaranteed and verified to work.

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