Canon Pla-501f Mask Aligner

US $27,500.00

  • San Jose, California, United States
  • Jan 30th
Canon PLA-501F proximity mask aligner with 4" wafer tooling 1.5um line resolution wafer size 2" to 5", photomask size  2 1/2" to 6". Resolution: contact mode negative resist: 2um positive resist: 1.5um Illuminator: uniformity + - 3% with USHIO 250w Hg lamp Exposure time set with light integrator Printing method: proximity and contact modes Printing wavelength: g-line 436nm h-line 405nm i-line 365 nm Auto alignment accuracy: + - 0.5um (2 sigma) auto alignment time: 10 sec cycling time: approx 30 sec(with 10 sec alignment time and 1 sec exposure time) weight: 225kg (496 lbs) Option: chuck proximity coplanarity jig (inquire) Completely rebuilt with new mirrors, stage rebuild, all pneumatic tubing replaced, new paint Crating: 600.00
Condition:
Seller refurbished: An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details. ...
Brand Canon
Country/Region of Manufacture Japan
Model PLA-501F

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