KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 0

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 1

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 2

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 3

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 4

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 5

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 6

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 7

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 8

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 9

KLA-Tencor 5100 XP registration tool / overlay measurement 5105, US $38,500.00 – Picture 10

Kla-tencor 5100 Xp Registration Tool / Overlay Measurement 5105

US $38,500.00

Boerne, Texas, United States
Jan 30th

Open on mobile:
QR code

31242 For sale is this KLA-Tencor 5100XP tool. Complete, in working condition, located in our Avezzano, Italy warehouse. See the details below and testing that was done on the tool, this tool is complete, in very good condition, includes manual as shown in photos above. See the reports below that were run on this tool. Please review the details below and make us an offer on this excellent condition tool. Thanks for looking and happy bidding! Manufacturer: KLA-Tencor Model: 5100 XP Type: registration tool / overlay measurement Version: 200 mm Condition: excellent Vintage: Apr 1999 Sale condition: as is where is Quantity: 1 Comments: Located in europe. CE Marked warehoused can be demonstrated in excellent condition This is a 5105 that has been upgraded to XP. Manufacturer: KLA-Tencor Model:5100 XP Date of manufacture: Apr 1999 Install date: May 1999 Turned off: Feb 2008 Removed: Feb 2008 Wafer size: 200 mm SECS/GEM: Yes Comments: Complete and missing no parts. Main sw version: UI 14.70.01 SECS: 5.3.28 KLASS: 4.01.04 Analysis station: 7.1.5 Included service manual for 510X/5200, XP p/n 990-472952-00 AA KLASP 720-451715-00 System Audit summary Oct 2001:- section 1 ********** 1a.Lamp wattage 120W 1b.Arc lamp light linearity check 15 um ring on 80% 212 15 um ring on 40% 111 15 um ring on 20% 98 (?) 15 um ring on 10% 54 15 um ring on 0% 38 ring off 20% 190 ring off 10% 77 1c.Pathlength calibration check Mirror station 2.384 correlation 98.8 % angle 177 degrees 1d.XY Infinite fringe check X Difference -19.5 nm (spec modulus less than 20 nm) Y difference 16.5 nm (spec modulus less than 20 nm) 1e. System focus offset 50FOV FO (Ring off) -0.065 um (spec modulus less than 150 nm) 3 sigma 0.003 um 50FOV FO (Ring on) -0.140 um (spec modulus less than 150 nm) 3 sigma 0.008 um Section 5a power supply voltage check ************************************* +48 VDC 47.9 V +5 VDC 5.08 V +24 VDC 24.0 200/240 VAC 225V -12 VDC -11.99 V +12 VDC 11.97 V Section 5c PZT Voltage check **************************** x pzt offset -40 leakage 80 gain -840 y pzt offset -40 leakage 0.0 gain -840 z pzt offset -90 leakage 0.0 gain -940 y pzt offset -90 leakage 70 gain -680 Section 5d Dead band check XYZ ****************************** All 0 deadband Section 7b Macro stage soft limit ********************************* X axis maximum value: 298.890 um Y axis maximum value: 285.890 um Section 7c Folding Error Check ****************************** X axis folding error: Right - Left 0.78 um Left - Right 0.49 um Y axis folding error: Right - Left 0.57 um Left - Right 0.0 um Section 8b Check light levels ***************************** 15 um ring on 80% 220 15 um ring on 40% 93 15 um ring on 20% 41 15 um ring on 10% 45 15 um ring on 0% 38 ring off 20% 97 ring off 10% 57 Section 8c Arc Lamp Light Noise Check ************************************* Light noise STD 80% = 0.28 STD 0% = 0.24 Noise = 0.13 Section 9e Fringes on/off check ******************************* pressure: 4 kg/m3 fringes (on-off) 90-90 ms Section 9g "z" slope verification ********************************* Original = 210 New (after adjustment) = 214 Section 9h Pathlength calibration check *************************************** Mirror station: Before Adjust: P = 3.22 um Corr = 96.5 % Angle = 177 degrees After adjustment: P = 2.091 um Corr = 97.1 % Angle = -117 degrees Section 9i XY Infinite fringe check *********************************** Mirror wafer Before adjust: x diff -32 um Y diff -5.2 um After adjust: x diff -7.8 um Y diff -6.5 um Mirror station Before adjust: x diff -17.5 um Y diff 16.5 um After adjust: x diff 9.1 um Y diff -9.8 um Section 9j system focus offset ****************************** 50 FOV (Ring off) = -0.067 um 3 sigma 0.011 um 50 FOV (Ring on) = -0.196 um 3 sigma 0.009 um Section 10a Pin diode voltage check *********************************** Offset 50 / 15 um FOV Diode voltage 1.16v Gain 50/15 FOV diode voltage 4.02v Section 10b pin diode position check ************************************ X-Distance 50 FOV 0.79 Y-distance 50 FOV 0.8 um Section 10c Autofocus signal check ********************************** 50 FOV signal to noise 109466 Section 12a Software PZT Coefficients ************************************* x pzt slope 218.6901 y pzt slope = 222.8733 Section 15d run daily monitor after PM ************************************** 0% 38 PASS 20%-50FOV 106 PASS 60%-50FOV 220 PASS light noise: STD30 0.54 STD0 0.35 NOISE 0.41 PASS Camera noise: 0.00 PASS Path length angle 176.9 correl. 0.963 p val 1.994 PASS Focus o/s vallue -0.010 3 sigma 0.008 PASS KLAASP light map test PASSED

Condition:	Used: An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections. ...	Brand	KLA Tencor
Country of Manufacture	United States
Model	5100