Brooks automation 10080-08 wafer pre-aligner robot ser# 9308-1089
@@ vexta stepping motor model pk543aw-a80 & valve setup (aq)
@@ ckd valve model vec-vh8-x0331-2 system valve controller (aq2)
@@ vexta stepping motor model pk543aw-a80 & valve setup (ap)
@@ vexta stepping motor model pk543aw-a80 & valve setup (an)
@@ vexta stepping motor model pk543aw-a80 & valve setup (am)
@@ vexta stepping motor model pk543aw-a80 & valve setup (al)
@@ vexta stepping motor model pk543aw-a80 & valve setup (af)
@@ vexta stepping motor model pk543aw-a80 & valve setup (ad)
@@ vexta stepping motor model pk543aw-a80 & valve setup (ac)
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