Plasma Therm 770 Icp Ion Couple Plasma Etching System

US $165,000.00

  • Wake Forest, North Carolina, United States
  • Jan 30th
Plasmatherm 770 ICP Ion Couple Plasma Etching System, Manual Load Lock, Ceramic Clamp style ICP system, Leybold 600C turbo with Leybold NT20 controller, VAT Pen VAT PM5 Gage Valve controller Watlow Six Zone Chamber heat controller MKS 290 Ion Gauge Controller Backside He Cooling Advanced Energy RF5S 500W RF lower Electrode power supply with match work and tuner RFVII 1000W 13.56MHz upper Electrode power supply with match work and tuner Currently four Mass Flow Controllers Can offer System refurbished, operational or As is, where is. Can offer installation & training as well. We also maintain a stocked inventory of spare parts for all Plasmatherm systems.
Condition Used :
An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes System complete recently removed from a production. Can be offered refurbished, installed with a 90 day warranty for an additional fee.

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