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Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 0
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 1
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 2
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 3
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 4
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 5
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 0
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 1
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 2
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 3
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 4
Plasma Therm Versaline PECVD Deposition System, US $145,000.00 – Picture 5

Plasma Therm Versaline Pecvd Deposition System

US $145,000.00

  • Wake Forest, North Carolina, United States
  • Jan 30th
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Plasma Therm VLR (Versaline) 7000 series Cassette to Cassette PECVD Deposition system. (1) LM/TM module & (1) PECVD Module.  Can run up to 8" dia. wafers.  Cassette to Cassette Load Lock with robot transfer into PECVD module. PECVD module consist Plasmatherm OS with a Watlow Six Zone Chamber heat controller, Advanced Energy RF5S - 500W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers Can offer System refurbished, operational or As is, where is. Can offer installation & training as well. We also maintain a stocked inventory of spare parts for all Plasmatherm systems.
Condition Used :
An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes “System is complete but offered as is. Can be offered refurbished, installed with a 90 day warranty for an additional fee.”

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