Tegal March Plasmod Tabletop Plasma Reactor Asher Pcb Etching Etcher System

US $875.00

  • United States
  • Jan 30th
Offering a TEGAL PLASMOD TABLETOP Plasma Reactor Etcher Sold for parts or repair. Unit tested for power only! MAKE AN OFFER!! Made in USA. Comes as pictured , tested for power only. The unit was found to power normally with rear fan operating and the Eimac Tubes burning bright. I have absolutely no other way to test. Please note; The outer pyrex chamber is damaged, but the inner looks to be in excellent shape with zero visible defects. May need a proper cleaning but otherwise excellent. I also did a very detailed visual inspection of all interior components. All components and parts look to be intact and in great shape. Check the pictures carefully for a better idea of condition. Email if you have any questions. Measures 14 3/4" D x 10 3/4" H x 12" W.   Manufactures Description: Tegal's PLASMOD is a tabletop plasma chemistry reactor designed to provide the scientific and educational community with plasma technology at a moderate cost. Tegal is able to provide such capability by engineering a simple to operate instrument which can perform repeatable plasma chemical reactions with a minimum of automation. All controls are manual; however, where necessary, automatic monitors and controls take over to protect the equipment and the samples in the reactor. The PLASMOD comes quipped with an internally housed RF generator. RF power is transferred from a power amplifier directly coupled to the reaction chamber through a matched impedance network. A variable capacitor provides fine tuning control for matching the output impedance of the RF generator with the capacitive load of the reaction chamber. An audible alarm sounds whenever the impedance match goes out of specification. This also aids in tuning since the alarm-off "window" corresponds to the "in tune" state of the machine. Instrumentation for the PLASMOD consists of a power tuning indicator, the audible tuning alarm, and provisions for several optional attachments. These include facilities for an externally mounted pressure transducer, and a strip chart recorder. Functional Description: The PLASMOD is a small reactor weighing approximately 35 pounds fully assembled (less the vacuum pump). With the exception of the external vacuum pump, it is a fully self-contained machine. It consists of an RF generator and associated tuning circuits, a vacuum system with a solenoid controlled valve, a constant feed gas supply system, and a reaction chamber system which includes two semicircular electrodes and two Pyrex glass chamber elements. RF Generator: The RF generator is a crystal controlled oscillator designed to provide up to 100 Watts of continuous wave 13.56 MHz power to the reaction chamber. This is the assigned industrial frequency per FCC regulations. Maximum power transfer from the RF amplifier tubes to the reaction chamber is accomplished by matching the output impedance of the generator to the input impedance of the reaction chamber. Tegal's proprietary AAT (Audio Assisted Tuning) sounds an alarm whenever the mismatch becomes excessive. If the matching does not improve, the RF generator goes into a pulsed mode. In this mode, the generator is turned on and off for a duty cycle which is proportional to the degree of mismatch. That is, the greater the mismatch, the shorter the ON time. This is done to protect the tube life since the reflected power increases during mismatch conditions. This power heats the RF amplifier tubes to well above normal operating temperatures and shortens tube life. Reaction Chamber: The reaction chamber sub-system consists of an upper and lower electrode and a two element Pyrex glass reaction chamber. These are open ended cylinders designed to fit into each other to form a closed chamber. The chamber is sealed with a flat silicone gasket which seats against a raised lip on the inner chamber portion. The gas delivery tube feeds through the back of the outer chamber section. This chamber section also provides connection to the vacuum hose by a glass tube joined at the front bottom of the chamber. The inner chamber is perforated by a series of slots located on the bottom surface of the chamber. Four little glass "feet" on the bottom of the inside chamber raise it off the inside surface of the outer chamber to provide a space between the two chamber sections. This arrangement provides for the best gas conduction flow and results in repeatable, dependable processing. Typical Plasma Process: The "Plasma Process" is accomplished through the use of a low pressure, RF induced gaseous discharge. The material or specimen is loaded into the reaction chamber. The chamber is evacuated to a mild vacuum (approximately 1.2 Torr) by a mechanical vacuum pump (not included). A carrier gas is drawn through the chamber over the specimen. Radio frequency power is applied around the chamber (usually 13.56 MHz). This excites the carrier gas molecules and changes some of them into chemically active atoms and molecules. The mechanism employed in this process is one of oxidation. Electrons produced by ionization of the gas, gain energy in the electric field. Subsequent collisions between these energetic electrons and neutral gas molecules result in an energy transfer to the molecules producing chemically active atoms, free radicals, ions and free electrons. The combustion products and harmless, are carried away in the gas stream. The unique property of this process is that it occurs near ambient temperatures without employing toxic chemicals. Guaranteed to be as described or your money back... Shipping is a flat $54.00 for Bulletproof Double Boxing to the Contenental US Only. The unit will be shipped in two seperate packages with the utmost care. Pyrex and tubes will be shipped together with a minimum of 4" of padding and protection. International customers please email for a quote..  Guaranteed as described or your money back!! Let me know if I have not earned 5 star service, I will do my best to serve. Wonder Lister - The Ultimate eBay Listing Tool
Condition For parts or not working :
An item that does not function as intended and is not fully operational. This includes items that are defective in ways that render them difficult to use, items that require service or repair, or items missing essential components. See the seller’s listing for full details.
Seller Notes TESTED FOR POWER ONLY. IT WILL NEED OUTER PYREX CHAMBER. SOLD FOR PARTS OR REPAIR ONLY!

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