56813 One (1) SINA, a modular in-line system manufactured by Roth and Rau for deposition of silicon nitride, or similar silicon based layer, on wafers (flat substrates) by a continuous PECVD process. The former application was for anti-reflection coating for solar cells. The systems consists of 5 chambers, or modules, for load-lock; heating; deposition; cooling off; load-lock and includes carriers for wafers through the system.
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