lm mask for sale, brand-new and used.

Motorized theta/x/y/z wafer to mask alignment with auto alignment mode, soft/ hard/ vacuum contact/ and proximity printing modes, 200mm hot plate bake module, Gencobot 4/3L dual arm robot with prealigner and 3 cassete stations, 500w lamphouse with shutter, 0.5micron alignment accuracy, high precision wedge compensation; MS Windows 98 interface, split field optics with Olympus LM PlanFL 10x objectives, OAI UV power meter, this aligner was installed and qualified but never put in production.