Novellus a94-042-01 pneumatic panel assy, load lock
Novellus gasonics 94-1172 rotator, receive asyst
(hd) smc 4.5" long rack of 5 vq110y-5l0 pneumatic valves
(hd) smc 7" long rack of 14 vq110y-5l0 pneumatic valves
Qty. 2 novellus 15-052620-00 retainer, tong, ring lift -semiconductor part new
(hd) smc pneumatic solenoid valve, sy5120-5loz-01, w/mounting bracket
(hd) smc pneumatic solenoid valve, sy5140-5lz-02, on 5-port manifold
Gasonics mfc/mfm interface board pcb 90-1036-01
Gasonics 90-2608 pca load lock interface -- pcb controller board
(hd) fujikin o.p. 0.34~0.69 mpa type n.c. pneumatic valve, 3/4" fittings
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