Plasma Therm Rie Etching System

US $95,000.00

  • Wake Forest, North Carolina, United States
  • Jan 30th
Plasma Therm VLR RIE module, Single wafer manual load system, no Load Lock.  RIE system, Leybold 361C turbo with Leybold  controller, Gate Valve, Advanced Energy RF5S 1000W RF 13.56MHz power supply with match work and tuner. 11" lower platen, 13" shower head. four Mass Flow Controllers (but additional ones can be added for an additional fee)  Can offer installation & training as well. We also maintain a stocked inventory of spare parts for all Plasmatherm systems. Service and Support Available.
Condition Seller refurbished :
An item that has been restored to working order by the eBay seller or a third party not approved by the manufacturer. This means the item has been inspected, cleaned, and repaired to full working order and is in excellent condition. This item may or may not be in original packaging. See the seller’s listing for full details.
Seller Notes System complete, refurbished,fully operational and comes with a 90 day warranty. Stock inventory of spare parts available.

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