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Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 0
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 1
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 2
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 3
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 4
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 5
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 6
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 0
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 1
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 2
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 3
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 4
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 5
Plasmatherm Versaline RIE- Reactive Ion Etching System, US $145,000.00 – Picture 6

Plasmatherm Versaline Rie- Reactive Ion Etching System

US $145,000.00

  • Wake Forest, North Carolina, United States
  • Jan 30th
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Plasmatherm VLR (Versaline) 7000 series Cassette to Cassette RIE system. (1) LM/TM module & (1) RIE Module.  Can run up to 8" dia. wafers.  Cassette to Cassette Load Lock with robot transfer into RIE module. RIE module consist of a Leybold 361C turbo pump with Leybold controller, MKS throttle valve with controller, Advanced Energy RF10S - 1000W RF lower Electrode power supply with match work and tuner. Currently set up with four Mass Flow Controllers Can offer System refurbished, operational or As is, where is. Can offer installation & training as well. We also maintain a stocked inventory of spare parts for all Plasmatherm systems.
Condition Used :
An item that has been used previously. The item may have some signs of cosmetic wear, but is fully operational and functions as intended. This item may be a floor model or store return that has been used. See the seller’s listing for full details and description of any imperfections.
Seller Notes “System is complete but offered as is. Can be offered refurbished, installed with a 90 day warranty for an additional fee.”

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