poly air for sale, brand-new and used.

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56813 One (1) SINA, a modular in-line system manufactured by Roth and Rau for deposition of silicon nitride, or similar silicon based layer, on wafers (flat substrates) by a continuous PECVD process. The former application was for anti-reflection coating for solar cells. The systems consists of 5 chambers, or modules, for load-lock; heating; deposition; cooling off; load-lock and includes carriers for wafers through the system.

200mm LPCVD furnace, tube 1: TEOS/anneal, tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3, 2 Kashiyama vacuum pumps with blowers, furnace dims: 66x36x78, gas module dims: 18x36x78, power req: 480v, 250amps max, 2002 vintage,complete specifications upon request. Crating and freight shipping required, call 408-360-0380 to discuss.

You are bidding on a COMPLETE diagnostics laboratory facility. For complete inventory list, visit the page listed below and view the catalog. Please call 805-617-0122 for more info or visit