New Advanced Energy/aera Fc-d980 Sih4 Mass Flow Controller Mfc Asm 54-123806a46

US $380

Phoenix, Arizona, United States
Jun 17th

Open on mobile:
QR code

NEW Advanced Energy/Aera TC FC-D980 SiH4 200 sccm Mass Flow Controller (MFC), ASM PN: 54-123806A46 Comes with what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Advanced Energy and may vary slightly due to upgrades, options, or revisions this unit may or may not have. This part is new, old stock from ASM. The unit probably needs to be calibrated. ASM Information: Part Number: 54-123806A46 Description: FC-AERA D980-4V-SIH4-200 SCCM The Unit's Tag Reads: Model Number: TC FC-D980 Flow Range: 200 SCCM Gas: SiH4 Fitting: 4 VCR Semi-Gas #: N/A Calibration Gas: N2 N2 Calibration Factor: 0.596 Link to the Datasheet: Advanced Energy AERA FC-D980 Series Mass Flow Controller Datasheet Description: Aera FC-D980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. Operational Specifications: Full-Scale Ranges: Single-gas model - 10 sccm to 5 slm Response Time: < or = to 1.0 sec typical per SEMI E17-91 (above 10% of full scale) Accuracy: < or = to ±1% of set point from 20 to 100% of full scale, < or = to ±0.25% of full scale from 2 to 25% of full scale Repeatability: < or = to ±0.2% of full scale Leak Integrity: 1 x 10-10 atm-cc/sec (He) maximum Control Range: 2 to 100% of full scale[4][5] Differential Pressure: 7 to 40 psi (49 to 275 kPa) Max. Operating Pressure: 70 psiG (490 kPaG) Proof Pressure: 140 psiG (981 kPaG) Temperature: 5 to 45°C (41 to 113°F) Gas Calibration: Up to six gases, with 11 calibration points per gas Gas Calibration Selection: Unlimited, based on using four surrogate calibration gases Alarm/Diagnostic Functions: Flow, valve voltage, EEPROM error, zero adjustment error, communications error, and microprocessor error Notes: 4: The multi-gas control range for D980 series MFCs with normally-closed control valves is 2 to 100% for all gases excluding H2 and He. The H2 and He control range is 5 to 100%. The multi-gas contorl range for D980 series MFCs with normally-open control valves is 5 to 100% for all gases. 5: The multi-gas control range for all D981 series MFCs is 5 to 100% for all gases. Physical Specifications: Control Valve Type: Normally-open or normally-closed piezoelectric Materials: Double VAR stainless steel, type 316L Standard Fittings: 1/4" VCR Surface Finish: All gas-wetted surfaces are electropolished and ultra-cleaned to 1 Ra (0.025 µm) Attitude Sensitivity: May be mounted in any position Weight: 1.0 kg (2.2 lb) Electrical Specifications: Input Power: +15 VDC ±2% at 140 mA, -15 VDC ±2% at 60 mA Power Consumption: 2.1 W max Input Signal: 0 to 5 VDC Output Indication: 0 to 5 VDC Control Data: Up to six sets of PID data For More Pictures Please Click the Following: Picture 2 - Front View Picture 3 - Part Number Tag For Domestic Customers: Packaging, handling, and order processing included in shipping in all domestic shipments as quoted by the shipping calculator. For International Customers there is a $15.00 minimum for packaging, handling, and order processing. International shipping to be determined by destination. Prior to shipment I need to know the following information: (1) Are you the end-user of this item? (2) If you are not the ultimate end-user of the item, please state the ultimate end user's name. (3) What is the ultimate country destination? If you have any questions please call Michael at 1-866-MHZ-ELEC (1-866-649-3532) Toll Free. Also, please click here to view or other auctions! 01/28/14 Powered by eBay Turbo Lister The free listing tool. List your items fast and easy and manage your active items.