- San Jose, California, United States
- US $295,000.00
- Jan 30th
200mm LPCVD furnace, tube 1: TEOS/anneal, tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3, 2 Kashiyama vacuum pumps with blowers, furnace dims: 66x36x78, gas module dims: 18x36x78, power req: 480v, 250amps max, 2002 vintage,complete specifications upon request. Crating and freight shipping required, call 408-360-0380 to discuss.