- Union City, California, United States
- Jan 30th
WEI Wafer Carrier Transport System, Diffusion Furnace Elevator Robotic, 3 Axis The system comprises a two, three or four short pin engagement system for engaging a wafer carrier for transporting semiconductor wafers by means of a three axis robotic transportation system for the purpose of processing semiconductor wafers in a factory. The multiple pin assembly allows a large reduction in travel distance with respect to prior art long rod engagement. This system is designed to raise and lower waf